Inventor · disambiguated record
Jeffrey E. Mcaninch
Also filed as: MCANINCH JEFFREY E
3 granted patents·85 citations·filing 2001–2006
74Inventor score
Files withTHERMA WAVE INC3
Top patents by PatentIndex Score
3 records- 0190US7061614B2Measurement system with separate optimized beam pathsTHERMA WAVE INC·Filed 2002·Granted Jun 13, 2006·43 cites·24 claims
- 0283US6813026B2Purge system for optical metrology toolTHERMA WAVE INC·Filed 2001·Granted Nov 2, 2004·36 cites·54 claims
- 0373US7227637B2Measurement system with separate optimized beam pathsTHERMA WAVE INC·Filed 2006·Granted Jun 5, 2007·6 cites·21 claims
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