Inventor · disambiguated record
Ming-Yeon Hung
Also filed as: HUNG MING-YEON
3 granted patents·3 pending applications·134 citations·filing 1996–2009
76Inventor score
Top patents by PatentIndex Score
6 records- 0192US8229588B2Method and system for tuning advanced process control parametersTSEN ANDY·Filed 2009·Granted Jul 24, 2012·32 cites·17 claims
- 0277US6069091AIn-situ sequential silicon containing hard mask layer/silicon layer plasma etch methodTAIWAN SEMICONDUCTOR MFG·Filed 1997·Granted May 30, 2000·65 cites·8 claims
- 0366US5770523AMethod for removal of photoresist residue after dry metal etchTAIWAN SEMICONDUCTOR MFG·Filed 1996·Granted Jun 23, 1998·37 cites·14 claims
- 0436US2005051196A1Developer dispensing apparatus with adjustable knife ringTAIWAN SEMICONDUCTOR MFG·Filed 2003·Application pending·0 cites
- 0533US2004188547A1Developer dispensing nozzle with movable shutter platesTAIWAN SEMICONDUCTOR MFG·Filed 2003·Application pending·0 cites
- 0630US2005211267A1Rinse nozzle and methodKAO YAO-HWAN·Filed 2004·Application pending·0 cites
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