Inventor · disambiguated record
Yasuhiko Ozawa
Also filed as: OZAWA YASUHIKO
28 granted patents·3 pending applications·483 citations·filing 1975–2009
97Inventor score
Top patents by PatentIndex Score
31 records- 0197US7026615B2Semiconductor inspection systemHITACHI LTD·Filed 2003·Granted Apr 11, 2006·65 cites·7 claims
- 0294US7235782B2Semiconductor inspection systemHITACHI LTD·Filed 2002·Granted Jun 26, 2007·43 cites·24 claims
- 0393US6864493B2Charged particle beam alignment method and charged particle beam apparatusHITACHI LTD·Filed 2002·Granted Mar 8, 2005·36 cites·24 claims
- 0492US6627888B2Scanning electron microscopeHITACHI LTD·Filed 2001·Granted Sep 30, 2003·30 cites·9 claims
- 0589US6476388B1Scanning electron microscope having magnification switching controlHITACHI LTD·Filed 1999·Granted Nov 5, 2002·95 cites·9 claims
- 0684US7062081B2Method and system for analyzing circuit pattern defectsHITACHI LTD·Filed 2001·Granted Jun 13, 2006·31 cites·11 claims
- 0778US6553323B1Method and its apparatus for inspecting a specimenHITACHI LTD·Filed 2000·Granted Apr 22, 2003·21 cites·24 claims
- 0877US7439505B2Scanning electron microscopeHITACHI LTD·Filed 2005·Granted Oct 21, 2008·2 cites·7 claims
- 0976US7605381B2Charged particle beam alignment method and charged particle beam apparatusHITACHI LTD·Filed 2003·Granted Oct 20, 2009·9 cites·7 claims
- 1076US7166840B2Method for determining depression/protrusion of sample and charged particle beam apparatus thereforHITACHI LTD·Filed 2005·Granted Jan 23, 2007·3 cites·4 claims
- 1176US6872943B2Method for determining depression/protrusion of sample and charged particle beam apparatus thereforHITACHI LTD·Filed 2002·Granted Mar 29, 2005·10 cites·18 claims
- 1272US8428336B2Inspecting method, inspecting system, and method for manufacturing electronic devicesIKEDA YOKO·Filed 2006·Granted Apr 23, 2013·7 cites·13 claims
- 1372US5049940AImage forming apparatusTOKYO ELECTRIC CO LTD·Filed 1990·Granted Sep 17, 1991·20 cites·7 claims
- 1471US7652249B2Charged particle beam apparatusHITACHI HIGH TECH CORP·Filed 2007·Granted Jan 26, 2010·2 cites·22 claims
- 1570US7352890B2Method for analyzing circuit pattern defects and a system thereofHITACHI LTD·Filed 2006·Granted Apr 1, 2008·3 cites·7 claims
- 1669US7181060B2Defect inspection methodHITACHI LTD·Filed 2002·Granted Feb 20, 2007·9 cites·13 claims
- 1766US8263935B2Charged particle beam apparatusTAKANE ATSUSHI·Filed 2009·Granted Sep 11, 2012·1 cites·23 claims
- 1865US8188429B2Scanning electron microscope for determining quality of a semiconductor patternOZAWA YASUHIKO·Filed 2008·Granted May 29, 2012·2 cites·7 claims
- 1963US6803573B2Scanning electron microscopeHITACHI LTD·Filed 2003·Granted Oct 12, 2004·6 cites·6 claims
- 2063US2010006755A1Charged particle beam alignment method and charged particle beam apparatusSATO MITSUGO·Filed 2009·Application pending·0 cites
- 2162US7068834B1Inspecting method, inspecting system, and method for manufacturing electronic devicesHITACHI LTD·Filed 1999·Granted Jun 27, 2006·35 cites·34 claims
- 2262US6756589B1Method for observing specimen and device thereforHITACHI LTD·Filed 1999·Granted Jun 29, 2004·29 cites·10 claims
- 2362US4681422APaper supply device for an electrostatic photographic printerTOKYO ELECTRIC CO LTD·Filed 1985·Granted Jul 21, 1987·14 cites·5 claims
- 2458US8666165B2Scanning electron microscopeYAMAGUCHI SATORU·Filed 2008·Granted Mar 4, 2014·1 cites·6 claims
- 2557US2007194236A1Semiconductor inspection systemTAKANE ATSUSHI·Filed 2007·Application pending·0 cites
- 2652US7002151B2Scanning electron microscopeHITACHI LTD·Filed 2004·Granted Feb 21, 2006·2 cites·12 claims
- 2748US7356177B2Defect image classifying method and apparatus and a semiconductor device manufacturing process based on the method and apparatusHITACHI LTD·Filed 2006·Granted Apr 8, 2008·0 cites·3 claims
- 2839US2001042705A1Method for classifying defects and device for the sameFiled 2001·Application pending·0 cites
- 2934US4007811AControl for elevatorMITSUBISHI ELECTRIC CORP·Filed 1975·Granted Feb 15, 1977·3 cites·3 claims
- 3033US4844077ANMR imaging methodHITACHI LTD·Filed 1988·Granted Jul 4, 1989·3 cites·9 claims
- 3130USRE34495ENMR imaging methodHITACHI LTD·Filed 1991·Granted Jan 4, 1994·1 cites·10 claims
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