Inventor · disambiguated record
Walter H. Class
Also filed as: CLASS WALTER · CLASS WALTER H
8 granted patents·462 citations·filing 1978–2007
90Inventor score
Top patents by PatentIndex Score
8 records- 0197US4422896AMagnetically enhanced plasma process and apparatusMATERIALS RESEARCH CORP·Filed 1982·Granted Dec 27, 1983·102 cites·16 claims
- 0297US4198283AMagnetron sputtering target and cathode assemblyMATERIALS RESEARCH CORP·Filed 1978·Granted Apr 15, 1980·100 cites·26 claims
- 0392US4472259AFocusing magnetron sputtering apparatusMATERIALS RESEARCH CORP·Filed 1981·Granted Sep 18, 1984·49 cites·8 claims
- 0491US4842703AMagnetron cathode and method for sputter coatingEATON CORP·Filed 1988·Granted Jun 27, 1989·74 cites·12 claims
- 0590US4581118AShaped field magnetron electrodeMATERIALS RESEARCH CORP·Filed 1983·Granted Apr 8, 1986·75 cites·16 claims
- 0689US4525262AMagnetron reactive bias sputtering method and apparatusMATERIALS RESEARCH CORP·Filed 1983·Granted Jun 25, 1985·35 cites·18 claims
- 0785US4428816AFocusing magnetron sputtering apparatusMATERIALS RESEARCH CORP·Filed 1983·Granted Jan 31, 1984·27 cites·19 claims
- 0847US7728293B2Structures and methods for measuring beam angle in an ion implanterAXCELIS TECH INC·Filed 2007·Granted Jun 1, 2010·0 cites·25 claims
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