Inventor · disambiguated record
Francois Buiguez
Also filed as: BUIGUEZ FRANCOIS
4 granted patents·240 citations·filing 1977–1987
81Inventor score
Files withCOMMISSARIAT ENERGIE ATOMIQUE4
Top patents by PatentIndex Score
4 records- 0193US4636281AProcess for the autopositioning of a local field oxide with respect to an insulating trenchCOMMISSARIAT ENERGIE ATOMIQUE·Filed 1985·Granted Jan 13, 1987·158 cites·17 claims
- 0275US4770977ASilicon-containing polymer and its use as a masking resin in a lithography processCOMMISSARIAT ENERGIE ATOMIQUE·Filed 1987·Granted Sep 13, 1988·28 cites·7 claims
- 0374US4124474AMethod and apparatus for controlling the deposition of films by reactive sputteringCOMMISSARIAT ENERGIE ATOMIQUE·Filed 1977·Granted Nov 7, 1978·27 cites·10 claims
- 0466US4689288APhotosensitive film based on silicon-containing polymer and its use as a masking resin in a lithography processCOMMISSARIAT ENERGIE ATOMIQUE·Filed 1985·Granted Aug 25, 1987·27 cites·15 claims
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