Inventor · disambiguated record

Atsunori Kiku

Also filed as: KIKU ATSUNORI

2 granted patents·57 citations·filing 2005–2014

64Inventor score

Technology areasG01N H10P

Files withRIGAKU DENKI CO LTD2

Top patents by PatentIndex Score

2 records

0192US7258485B2X-ray thin film inspection apparatus and thin film inspection apparatus and method for patterned waferRIGAKU DENKI CO LTD·Filed 2005·Granted Aug 21, 2007·47 cites·18 claims
0290US9658174B2X-ray topography apparatusRIGAKU DENKI CO LTD·Filed 2014·Granted May 23, 2017·10 cites·6 claims

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