Inventor · disambiguated record
Tatsuru Tanaka
Also filed as: TANAKA TATSURU
8 granted patents·3 pending applications·125 citations·filing 2000–2016
83Inventor score
Top patents by PatentIndex Score
11 records- 0192US8674327B1Systems and methods for uniformly implanting materials on substrates using directed magnetic fieldsPOON CHIN YIM·Filed 2012·Granted Mar 18, 2014·70 cites·34 claims
- 0284US6517691B1Substrate processing systemINTEVAC INC·Filed 2000·Granted Feb 11, 2003·46 cites·34 claims
- 0378US10744842B2Vehicular air conditioning deviceDENSO CORP·Filed 2016·Granted Aug 18, 2020·2 cites·9 claims
- 0461US9228254B2Cathode sputtering gas distribution apparatusYI CHANG BOK·Filed 2006·Granted Jan 5, 2016·1 cites·12 claims
- 0551US10054363B2Method and apparatus for cryogenic dynamic coolingWD MEDIA LLC·Filed 2014·Granted Aug 21, 2018·0 cites·43 claims
- 0650US8701753B2Method and apparatus for cooling a planar workpiece in an evacuated environment with dynamically moveable heat sinksYI CHANG BOK·Filed 2004·Granted Apr 22, 2014·6 cites·20 claims
- 0746US10744852B2Vehicular air-conditioning deviceDENSO CORP·Filed 2016·Granted Aug 18, 2020·0 cites·7 claims
- 0841US2005132960A1Small volume environmental chamber and multi-chamber processing apparatus comprising sameSEAGATE TECHNOLOGY LLC·Filed 2003·Application pending·0 cites
- 0940US2007158181A1Method & apparatus for cathode sputtering with uniform process gas distributionSEAGATE TECHNOLOGY LLC·Filed 2006·Application pending·0 cites
- 1039US2014050843A1Dual single sided sputter chambers with sustaining heaterYI CHANG B·Filed 2012·Application pending·0 cites
- 1136US8573579B2Biasing a pre-metalized non-conductive substrateYI CHANG BOK·Filed 2010·Granted Nov 5, 2013·0 cites·20 claims
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