Inventor · disambiguated record
Kenji Yamazoe
Also filed as: YAMAZOE KENJI
49 granted patents·4 pending applications·327 citations·filing 2002–2025
98Inventor score
Top patents by PatentIndex Score
53 records- 0197US11435670B1Multi-component kernels for vector optical image simulationTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2021·Granted Sep 6, 2022·3 cites·20 claims
- 0297US11320747B2Method of manufacturing a semiconductor device and apparatus for manufacturing the semiconductor deviceTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2020·Granted May 3, 2022·3 cites·20 claims
- 0396US7508493B2Exposure apparatus and device manufacturing methodCANON KK·Filed 2007·Granted Mar 24, 2009·30 cites·10 claims
- 0494US7009686B2Exposure methodCANON KK·Filed 2003·Granted Mar 7, 2006·60 cites·8 claims
- 0593US11709435B2Method of manufacturing a semiconductor device and apparatus for manufacturing the semiconductor deviceTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2022·Granted Jul 25, 2023·1 cites·20 claims
- 0693US7107573B2Method for setting mask pattern and illumination conditionCANON KK·Filed 2002·Granted Sep 12, 2006·48 cites·19 claims
- 0792US11754930B2Multi-component kernels for vector optical image simulationTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2022·Granted Sep 12, 2023·1 cites·20 claims
- 0891US8059262B2Calculation program, and exposure method for calculating light intensity distribution formed on image planeYAMAZOE KENJI·Filed 2008·Granted Nov 15, 2011·11 cites·5 claims
- 0991US7217503B2Exposure method and apparatusCANON KK·Filed 2002·Granted May 15, 2007·41 cites·19 claims
- 1088US10990002B2Sub-resolution assist featuresTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2019·Granted Apr 27, 2021·3 cites·20 claims
- 1188US7359033B2Exposure method and apparatusCANON KK·Filed 2006·Granted Apr 15, 2008·10 cites·12 claims
- 1287US10530976B2Endoscope probes and systems, and methods for use therewithCANON USA INC·Filed 2018·Granted Jan 7, 2020·4 cites·15 claims
- 1387US10288868B2Optical probe, light intensity detection, imaging method and systemCANON USA INC·Filed 2015·Granted May 14, 2019·6 cites·28 claims
- 1487US7657865B2Computer-readable recording medium recording a mask data generation program, mask data generation method, mask fabrication method, exposure method, and device manufacturing methodCANON KK·Filed 2007·Granted Feb 2, 2010·9 cites·8 claims
- 1586US12235589B2Method of manufacturing a semiconductor device and apparatus for manufacturing the semiconductor deviceTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2023·Granted Feb 25, 2025·0 cites·20 claims
- 1685US7675629B2Exposure apparatus and device manufacturing method using a common path interferometer to form an interference pattern and a processor to calculate optical characteristics of projection optics using the interference patternCANON KK·Filed 2007·Granted Mar 9, 2010·14 cites·17 claims
- 1784US12153349B2Multi-component kernels for vector optical image simulationTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2023·Granted Nov 26, 2024·0 cites·20 claims
- 1884US7573563B2Exposure apparatus and device manufacturing methodCANON KK·Filed 2006·Granted Aug 11, 2009·7 cites·5 claims
- 1983US12416857B2Sub-resolution assist featuresTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2023·Granted Sep 16, 2025·0 cites·20 claims
- 2082US9228921B2Aberration estimating method, program, and image-pickup apparatusCANON KK·Filed 2013·Granted Jan 5, 2016·3 cites·16 claims
- 2181US10966597B2Forward and angle view endoscopeCANON USA INC·Filed 2016·Granted Apr 6, 2021·4 cites·16 claims
- 2280US7214453B2Mask and its manufacturing method, exposure, and device fabrication methodCANON KK·Filed 2004·Granted May 8, 2007·16 cites·10 claims
- 2379US8635563B2Mask data producing method and mask data producing programCANON KK·Filed 2012·Granted Jan 21, 2014·2 cites·9 claims
- 2478US2025147431A1Method of manufacturing a semiconductor device and apparatus for manufacturing the semiconductor deviceTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2025·Application pending·0 cites
- 2577US8502962B2Computer readable storage medium including effective light source calculation program, and exposure methodKAWASHIMA MIYOKO·Filed 2010·Granted Aug 6, 2013·3 cites·11 claims
- 2677US7761840B2Mask data generation including a main pattern and an auxiliary patternCANON KK·Filed 2007·Granted Jul 20, 2010·4 cites·9 claims
- 2776US9507253B2Mask pattern generating method, recording medium, and information processing apparatusCANON KK·Filed 2014·Granted Nov 29, 2016·4 cites·11 claims
- 2873US10073936B2Calculation method, generation method, program, exposure method, and mask fabrication methodCANON KK·Filed 2014·Granted Sep 11, 2018·1 cites·14 claims
- 2973US7379151B2Exposure apparatus comprising cleaning apparatus for cleaning mask with laser beamCANON KK·Filed 2006·Granted May 27, 2008·3 cites·11 claims
- 3072US8321815B2Recording medium storing original data generation program, original data generation method, original fabricating method, exposure method, and device manufacturing methodYAMAZOE KENJI·Filed 2009·Granted Nov 27, 2012·3 cites·11 claims
- 3171US11829066B2Sub-resolution assist featuresTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2021·Granted Nov 28, 2023·0 cites·20 claims
- 3270US8365104B2Original data producing method and original data producing programCANON KK·Filed 2007·Granted Jan 29, 2013·2 cites·16 claims
- 3369US10866525B2Method of manufacturing a semiconductor device and apparatus for manufacturing the semiconductor deviceTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2019·Granted Dec 15, 2020·0 cites·20 claims
- 3469US10444146B2Optical probe, light intensity detection, imaging method and systemCANON USA INC·Filed 2016·Granted Oct 15, 2019·1 cites·19 claims
- 3569US10194065B2Endoscope probes and systems, and methods for use therewithCANON USA INC·Filed 2016·Granted Jan 29, 2019·1 cites·24 claims
- 3669US7586626B2Measurement method, exposure method, exposure apparatus, and device fabrication methodCANON KK·Filed 2008·Granted Sep 8, 2009·2 cites·12 claims
- 3768US6839890B2Mask manufacturing methodCANON KK·Filed 2002·Granted Jan 4, 2005·9 cites·32 claims
- 3867US8239787B2Method of generating original plate data by repeatedly calculating approximate aerial imageYAMAZOE KENJI·Filed 2008·Granted Aug 7, 2012·2 cites·5 claims
- 3967US8163448B2Determination method, exposure method, device fabrication method, and storage mediumHAKKO MANABU·Filed 2010·Granted Apr 24, 2012·3 cites·12 claims
- 4067US7317511B2Light modulator, and optical apparatus using the sameCANON KK·Filed 2005·Granted Jan 8, 2008·2 cites·14 claims
- 4165US9869820B2Optical probe, light intensity detection, imaging method and systemCANON USA INC·Filed 2015·Granted Jan 16, 2018·1 cites·13 claims
- 4264US8843337B2Apparatus for measuring shape of test surface, and recording medium storing program for calculating shape of test surfaceYAMAZOE KENJI·Filed 2010·Granted Sep 23, 2014·2 cites·8 claims
- 4360US7821648B2Measurement method, a measurement apparatus, and a computer-readable recording mediumCANON KK·Filed 2008·Granted Oct 26, 2010·3 cites·8 claims
- 4459US2025252550A1Method and system for retrieving diffraction parameter of photomaskTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2024·Application pending·0 cites
- 4557US2025004383A1Method of producing mask data for semiconductor device manufacturingTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2023·Application pending·0 cites
- 4656US8908153B2Method to calculate transmission cross coefficient in an exposure apparatusYAMAZOE KENJI·Filed 2011·Granted Dec 9, 2014·0 cites·9 claims
- 4755US8411253B2Computer readable medium and exposure methodSEKINE YOSHIYUKI·Filed 2009·Granted Apr 2, 2013·2 cites·11 claims
- 4854US7399558B2Mask and manufacturing method thereof and exposure methodCANON KK·Filed 2004·Granted Jul 15, 2008·3 cites·7 claims
- 4952US2023005738A1Method of manufacturing semiconductor devices and pattern formation method for manufacturing semiconductor devicesTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2022·Application pending·0 cites
- 5050US7414240B2Particle remover, exposure apparatus having the same, and device manufacturing methodCANON KK·Filed 2005·Granted Aug 19, 2008·0 cites·12 claims
Showing the top 50 of 53 patent records by PatentIndex Score.
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