Inventor · disambiguated record
Franciscus Johannes Joseph Janssen
Also filed as: JANSSEN FRANCISCUS JOHANNES JO · JANSSEN FRANCISCUS JOHANNES JOSEPH
47 granted patents·2 pending applications·173 citations·filing 2005–2022
98Inventor score
Files withASML NETHERLANDS BV27JANSEN HANS3NIENHUYS HAN-KWANG3CADEE THEODORUS PETRUS MARIA2JANSSEN FRANCISCUS JOHANNES JOSEPH2
Top patents by PatentIndex Score
49 records- 0196US7804575B2Lithographic apparatus and device manufacturing method having liquid evaporation controlASML NETHERLANDS BV·Filed 2005·Granted Sep 28, 2010·23 cites·44 claims
- 0295US7652746B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2005·Granted Jan 26, 2010·22 cites·50 claims
- 0394US11378893B2Lithographic apparatus and device manufacturing method involving a heaterASML NETHERLANDS BV·Filed 2020·Granted Jul 5, 2022·2 cites·20 claims
- 0493US9454088B2Immersion liquid, exposure apparatus, and exposure processASML NETHERLANDS BV·Filed 2015·Granted Sep 27, 2016·4 cites·19 claims
- 0592US9182678B2Lithographic apparatus and device manufacturing methodVAN DE KERKHOF MARCUS ADRIANUS·Filed 2012·Granted Nov 10, 2015·6 cites·20 claims
- 0692US7751027B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2006·Granted Jul 6, 2010·18 cites·65 claims
- 0791US8730448B2Lithographic apparatus and device manufacturing methodNIENHUYS HAN-KWANG·Filed 2012·Granted May 20, 2014·9 cites·19 claims
- 0889US10416574B2Lithographic apparatusASML NETHERLANDS BV·Filed 2016·Granted Sep 17, 2019·5 cites·14 claims
- 0989US9188880B2Lithographic apparatus and device manufacturing method involving a heaterCADEE THEODORUS PETRUS MARIA·Filed 2011·Granted Nov 17, 2015·4 cites·32 claims
- 1088US9772565B2Immersion liquid, exposure apparatus, and exposure processASML NETHERLANDS BV·Filed 2016·Granted Sep 26, 2017·2 cites·20 claims
- 1188US9268242B2Lithographic apparatus and device manufacturing method involving a heater and a temperature sensorCADEE THEODORUS PETRUS MARIA·Filed 2010·Granted Feb 23, 2016·4 cites·38 claims
- 1287US9268236B2Lithographic apparatus and device manufacturing method having heat pipe with fluid to cool substrate and/or substrate holderJACOBS JOHANNES HENRICUS WILHELMUS·Filed 2010·Granted Feb 23, 2016·5 cites·27 claims
- 1387US7561250B2Lithographic apparatus having parts with a coated film adhered theretoASML NETHERLANDS BV·Filed 2007·Granted Jul 14, 2009·9 cites·36 claims
- 1486US10838310B2Lithographic apparatus and device manufacturing method involving a heaterASML NETHERLANDS BV·Filed 2019·Granted Nov 17, 2020·1 cites·20 claims
- 1586US8233134B2Lithographic apparatus and device manufacturing methodVAN DE KERKHOF MARCUS ADRIANUS·Filed 2008·Granted Jul 31, 2012·6 cites·18 claims
- 1685US9164391B2Immersion liquid, exposure apparatus, and exposure processASML NETHERLANDS BV·Filed 2014·Granted Oct 20, 2015·2 cites·20 claims
- 1785US7633073B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2005·Granted Dec 15, 2009·5 cites·30 claims
- 1883US10580545B2Beam delivery apparatus and methodASML NETHERLANDS BV·Filed 2014·Granted Mar 3, 2020·6 cites·38 claims
- 1983US8970818B2Lithographic apparatus and component with repeating structure having increased thermal accommodation coefficientNIENHUYS HAN-KWANG·Filed 2012·Granted Mar 3, 2015·5 cites·19 claims
- 2083US7928407B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2006·Granted Apr 19, 2011·4 cites·15 claims
- 2179US8451423B2Lithographic apparatus and methodJANSSEN FRANCISCUS JOHANNES JOSEPH·Filed 2009·Granted May 28, 2013·7 cites·30 claims
- 2276US8472003B2Fluid handling structure, lithographic apparatus and device manufacturing methodPATEL HRISHIKESH·Filed 2010·Granted Jun 25, 2013·5 cites·24 claims
- 2376US8138486B2Lithographic apparatus and device manufacturing methodJANSEN HANS·Filed 2009·Granted Mar 20, 2012·2 cites·20 claims
- 2474US9625835B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2012·Granted Apr 18, 2017·2 cites·14 claims
- 2574US8859188B2Immersion liquid, exposure apparatus, and exposure processJANSEN HANS·Filed 2006·Granted Oct 14, 2014·2 cites·32 claims
- 2673US9372413B2Optical apparatus for conditioning a radiation beam for use by an object, lithography apparatus and method of manufacturing devicesDE VRIES GOSSE CHARLES·Filed 2012·Granted Jun 21, 2016·2 cites·20 claims
- 2769US9164401B2Projection system and lithographic apparatusLOOPSTRA ERIK ROELOF·Filed 2009·Granted Oct 20, 2015·2 cites·23 claims
- 2869US8680493B2Radiation conduit for radiation sourceSCHEPERS MAIKEL ADRIANUS CORNELIS·Filed 2012·Granted Mar 25, 2014·3 cites·13 claims
- 2969US8462314B2Lithographic apparatus and device manufacturing methodBECKERS MARCEL·Filed 2008·Granted Jun 11, 2013·3 cites·28 claims
- 3067US8797504B2Lithographic apparatus and device manufacturing methodNIENHUYS HAN-KWANG·Filed 2012·Granted Aug 5, 2014·1 cites·19 claims
- 3164US10712675B2Immersion liquid, exposure apparatus, and exposure processASML NETHERLANDS BV·Filed 2017·Granted Jul 14, 2020·0 cites·20 claims
- 3263US10254663B2Lithographic apparatus and device manufacturing method involving a heaterASML NETHERLANDS BV·Filed 2015·Granted Apr 9, 2019·0 cites·38 claims
- 3361US10935895B2Lithographic apparatusASML NETHERLANDS BV·Filed 2019·Granted Mar 2, 2021·0 cites·21 claims
- 3461US10088755B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2017·Granted Oct 2, 2018·0 cites·20 claims
- 3560US10268127B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2017·Granted Apr 23, 2019·0 cites·20 claims
- 3659US9645506B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2013·Granted May 9, 2017·0 cites·20 claims
- 3757US9715179B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2015·Granted Jul 25, 2017·0 cites·20 claims
- 3857US2024411233A1Lithographic apparatus and associated methodsASML NETHERLANDS BV·Filed 2022·Application pending·0 cites
- 3956US8481978B2Lithographic apparatus and device manufacturing methodJANSEN HANS·Filed 2011·Granted Jul 9, 2013·0 cites·20 claims
- 4055US8681308B2Lithographic apparatus and device manufacturing methodBERKVENS PAUL PETRUS JOANNES·Filed 2007·Granted Mar 25, 2014·1 cites·22 claims
- 4155US2011090474A1Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2010·Application pending·0 cites
- 4254US9823590B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2017·Granted Nov 21, 2017·0 cites·20 claims
- 4353US8817229B2Method of cooling an optical element, lithographic apparatus and method for manufacturing a deviceJANSSEN FRANCISCUS JOHANNES JOSEPH·Filed 2011·Granted Aug 26, 2014·0 cites·21 claims
- 4451US11163240B2Heating system for an optical component of a lithographic apparatusASML NETHERLANDS BV·Filed 2020·Granted Nov 2, 2021·0 cites·26 claims
- 4549US8537330B2Lithographic apparatus, device manufacturing method and computer readable mediumLOOPSTRA ERIK ROELOF·Filed 2011·Granted Sep 17, 2013·0 cites·18 claims
- 4646US8760621B2Lithographic apparatus and methodHOOGENDAM CHRISTIAAN ALEXANDER·Filed 2007·Granted Jun 24, 2014·0 cites·22 claims
- 4743US9176398B2Method and system for thermally conditioning an optical elementSCHMITZ ROGER WILHELMUS ANTONIUS HENRICUS·Filed 2009·Granted Nov 3, 2015·1 cites·13 claims
- 4839US10877384B1Radiation shielding device and apparatus comprising such shielding deviceASML NETHERLANDS BV·Filed 2019·Granted Dec 29, 2020·0 cites·19 claims
- 4937US10268128B2Lithographic apparatusASML NETHERLANDS BV·Filed 2016·Granted Apr 23, 2019·0 cites·20 claims
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