Inventor · disambiguated record
Shoji Okiguchi
Also filed as: OKIGUCHI SHOJI
12 granted patents·1 pending application·152 citations·filing 1997–2011
91Inventor score
Technology areasH10P
Top patents by PatentIndex Score
13 records- 0181US6795745B1Methods of operating vacuum processing equipment and methods of processing wafersHITACHI LTD·Filed 2000·Granted Sep 21, 2004·26 cites·6 claims
- 0277US6745093B1Vacuum process apparatus and method of operating the sameHITACHI LTD·Filed 2000·Granted Jun 1, 2004·19 cites·10 claims
- 0376US6920369B2Methods of operating vacuum processing equipment and methods of processing wafersHITACHI LTD·Filed 2004·Granted Jul 19, 2005·17 cites·3 claims
- 0473US6714832B1Operating method of vacuum processing system and vacuum processing systemHITACHI LTD·Filed 2000·Granted Mar 30, 2004·12 cites·9 claims
- 0572US6917844B2Vacuum process apparatus and method of operating the sameHITACHI LTD·Filed 2004·Granted Jul 12, 2005·13 cites·5 claims
- 0671US6941185B2Operating method of vacuum processing system and vacuum processing systemHITACHI LTD·Filed 2002·Granted Sep 6, 2005·11 cites·18 claims
- 0771US6853872B2Operating method of vacuum processing system and vacuum processing systemHITACHI LTD·Filed 2002·Granted Feb 8, 2005·10 cites·10 claims
- 0871US6069096AOperating method of vacuum processing system and vacuum processing systemHITACHI LTD·Filed 1997·Granted May 30, 2000·40 cites·15 claims
- 0954US8033770B2Vacuum processing apparatusHITACHI HIGH TECH CORP·Filed 2008·Granted Oct 11, 2011·0 cites·4 claims
- 1054US7862289B2Vacuum processing apparatus and vacuum processing methodHITACHI HIGH TECH CORP·Filed 2008·Granted Jan 4, 2011·0 cites·1 claims
- 1151US6885906B2Operating method of vacuum processing system and vacuum processing systemHITACHI LTD·Filed 2002·Granted Apr 26, 2005·2 cites·29 claims
- 1248US7476073B2Vacuum processing methodHITACHI HIGH TECH CORP·Filed 2004·Granted Jan 13, 2009·2 cites·4 claims
- 1347US2011299962A1Vacuum Processing Apparatus And Vacuum Processing MethodOONO TAKESHI·Filed 2011·Application pending·0 cites
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