Inventor · disambiguated record
Kazuhiro Joo
Also filed as: JOO KAZUHIRO
7 granted patents·3 pending applications·86 citations·filing 1997–2011
86Inventor score
Top patents by PatentIndex Score
10 records- 0182US8747608B2Plasma processing apparatusUSUI TATEHITO·Filed 2011·Granted Jun 10, 2014·6 cites·7 claims
- 0279US8088247B2Plasma processing apparatusUSUI TATEHITO·Filed 2006·Granted Jan 3, 2012·5 cites·2 claims
- 0373US6714832B1Operating method of vacuum processing system and vacuum processing systemHITACHI LTD·Filed 2000·Granted Mar 30, 2004·12 cites·9 claims
- 0471US6941185B2Operating method of vacuum processing system and vacuum processing systemHITACHI LTD·Filed 2002·Granted Sep 6, 2005·11 cites·18 claims
- 0571US6853872B2Operating method of vacuum processing system and vacuum processing systemHITACHI LTD·Filed 2002·Granted Feb 8, 2005·10 cites·10 claims
- 0671US6069096AOperating method of vacuum processing system and vacuum processing systemHITACHI LTD·Filed 1997·Granted May 30, 2000·40 cites·15 claims
- 0751US6885906B2Operating method of vacuum processing system and vacuum processing systemHITACHI LTD·Filed 2002·Granted Apr 26, 2005·2 cites·29 claims
- 0850US2007178610A1Semiconductor Production ApparatusUSUI TATEHITO·Filed 2007·Application pending·0 cites
- 0942US2005194095A1Semiconductor production apparatusFiled 2004·Application pending·0 cites
- 1038US2008216956A1Plasma processing apparatusNAKAMOTO SHIGERU·Filed 2007·Application pending·0 cites
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