Inventor · disambiguated record
Yeong-Song Yen
Also filed as: YEN YEONG-SONG
3 granted patents·1 pending application·38 citations·filing 2001–2002
71Inventor score
Files withUNITED MICROELECTRONICS CORP3
Top patents by PatentIndex Score
4 records- 0173US6839126B2Photolithography process with multiple exposuresUNITED MICROELECTRONICS CORP·Filed 2002·Granted Jan 4, 2005·13 cites·29 claims
- 0268US6391757B1Dual damascene processUNITED MICROELECTRONICS CORP·Filed 2001·Granted May 21, 2002·17 cites·12 claims
- 0356US6833318B2Gap-filling processUNITED MICROELECTRONICS CORP·Filed 2002·Granted Dec 21, 2004·8 cites·13 claims
- 0434US2003096496A1Method of forming dual damascene structureFiled 2001·Application pending·0 cites
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