Inventor · disambiguated record
Tetsuo Kitabayashi
Also filed as: KITABAYASHI TETSUO
15 granted patents·2 pending applications·908 citations·filing 1989–2023
94Inventor score
Top patents by PatentIndex Score
17 records- 0198US5117121AMethod of and apparatus for applying voltage to electrostatic chuckTOTO LTD·Filed 1990·Granted May 26, 1992·431 cites·6 claims
- 0289US6768627B1Electrostatic chuck and processing apparatus for insulative substrateTOTO LTD·Filed 2000·Granted Jul 27, 2004·63 cites·25 claims
- 0389US5151845AElectrostatic chuckTOTO LTD·Filed 1991·Granted Sep 29, 1992·122 cites·12 claims
- 0484US5530616AElectrostastic chuckTOTO LTD·Filed 1994·Granted Jun 25, 1996·106 cites·19 claims
- 0583US7209339B2Electrostatic chuck for an electrically insulative substrate, and a method of using sameTOTO LTD·Filed 2004·Granted Apr 24, 2007·30 cites·19 claims
- 0682US10679873B2Ceramic heaterNGK SPARK PLUG CO·Filed 2017·Granted Jun 9, 2020·4 cites·9 claims
- 0782US10453712B2Holding deviceNGK SPARK PLUG CO·Filed 2017·Granted Oct 22, 2019·3 cites·4 claims
- 0881US5104834ADielectric ceramics for electrostatic chucks and method of making themTOT LTD·Filed 1989·Granted Apr 14, 1992·65 cites·6 claims
- 0975US5384682AElectrostatic chuckTOTO LTD·Filed 1993·Granted Jan 24, 1995·56 cites·13 claims
- 1069US10840117B2Holding apparatusNGK SPARK PLUG CO·Filed 2017·Granted Nov 17, 2020·1 cites·7 claims
- 1164US7450365B2Electrostatic chuckTOTO LTD·Filed 2007·Granted Nov 11, 2008·3 cites·6 claims
- 1264US7248457B2Electrostatic chuckTOTO LTD·Filed 2005·Granted Jul 24, 2007·3 cites·3 claims
- 1356US2023317506A1Substrate holderNGK SPARK PLUG CO·Filed 2023·Application pending·0 cites
- 1449US5384681AElectrostatic chuckTOTO LTD·Filed 1993·Granted Jan 24, 1995·18 cites·18 claims
- 1541US11043401B2Ceramic memberNGK SPARK PLUG CO·Filed 2018·Granted Jun 22, 2021·0 cites·8 claims
- 1638USD561206SElectrostatic chuckMOMENTIVE PERFORMANCE MAT INC·Filed 2005·Granted Feb 5, 2008·3 cites·1 claims
- 1734US2006158822A1Method for attracting glass substrate with electrostatic chuck and electrostatic chuckTOTO LTD·Filed 2005·Application pending·0 cites
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