Inventor · disambiguated record
Subash Gupta
Also filed as: GUPTA SUBASH
7 granted patents·308 citations·filing 1995–1997
88Inventor score
Files withADVANCED MICRO DEVICES INC6
Top patents by PatentIndex Score
7 records- 0193US5710067ASilicon oxime filmADVANCED MICRO DEVICES INC·Filed 1995·Granted Jan 20, 1998·171 cites·101 claims
- 0274US5937319AMethod of making a metal oxide semiconductor (MOS) transistor polysilicon gate with a size beyond photolithography limitation by using polysilicidation and selective etchingADVANCED MICRO DEVICES INC·Filed 1997·Granted Aug 10, 1999·35 cites·58 claims
- 0373US5876903AVirtual hard mask for etchingADVANCED MICRO DEVICES INC·Filed 1996·Granted Mar 2, 1999·43 cites·19 claims
- 0459US5807790ASelective i-line BARL etch processADVANCED MICRO DEVICES INC·Filed 1997·Granted Sep 15, 1998·25 cites·16 claims
- 0549US5885902AIntegrated arc and polysilicon etching processADVANCED MICRO DEVICES INC·Filed 1997·Granted Mar 23, 1999·14 cites·10 claims
- 0645US5977542ARestoration of CD fidelity by dissipating electrostatic chargeFiled 1997·Granted Nov 2, 1999·9 cites·15 claims
- 0744US5763327AIntegrated arc and polysilicon etching processADVANCED MICRO DEVICES INC·Filed 1995·Granted Jun 9, 1998·11 cites·7 claims
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