Inventor · disambiguated record
Tom Yu
Also filed as: YU TOM · YU TOM Y
6 granted patents·111 citations·filing 1994–2006
84Inventor score
Top patents by PatentIndex Score
6 records- 0195US7645696B1Deposition of thin continuous PVD seed layers having improved adhesion to the barrier layerNOVELLUS SYSTEMS INC·Filed 2006·Granted Jan 12, 2010·56 cites·24 claims
- 0276US6471831B2Apparatus and method for improving film uniformity in a physical vapor deposition systemNOVELLUS SYSTEMS INC·Filed 2001·Granted Oct 29, 2002·14 cites·20 claims
- 0374US6468404B2Apparatus and method for reducing redeposition in a physical vapor deposition systemNOVELLUS SYSTEMS INC·Filed 2001·Granted Oct 22, 2002·12 cites·20 claims
- 0463US6362794B1Antenna of wireless LAN cardGEMTEK TECHNOLOGY CO LTD·Filed 2001·Granted Mar 26, 2002·17 cites·4 claims
- 0541US5567481AApparatus and method for coating and drying paper sheetsFiled 1995·Granted Oct 22, 1996·11 cites·24 claims
- 0617US5457283AApparatus for coating and drying paper sheetsYU TOM Y·Filed 1994·Granted Oct 10, 1995·1 cites·7 claims
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