Inventor · disambiguated record
Galen L. Pfeiffer
Also filed as: PFEIFFER GALEN L
42 granted patents·554 citations·filing 2002–2023
98Inventor score
Files withJ A WOOLLAM CO INC29LIPHARDT MARTIN M5PFEIFFER GALEN L4HASSLER CHRISTOPHER D1HOVORKA GRIFFIN A P1
Top patents by PatentIndex Score
42 records- 0198US7633625B1Spectroscopic ellipsometer and polarimeter systemsJ A WOOLLAM CO INC·Filed 2007·Granted Dec 15, 2009·115 cites·2 claims
- 0296US7616319B1Spectroscopic ellipsometer and polarimeter systemsJAMES D WELCH·Filed 2007·Granted Nov 10, 2009·117 cites·67 claims
- 0395US6937341B1System and method enabling simultaneous investigation of sample with two beams of electromagnetic radiationJ A WOOLLAM CO INC·Filed 2002·Granted Aug 30, 2005·96 cites·40 claims
- 0491US6982792B1Spectrophotometer, ellipsometer, polarimeter and the like systemsJ A WOOLLAM CO INC·Filed 2003·Granted Jan 3, 2006·49 cites·26 claims
- 0588US10338362B1Beam focusing and reflecting optics with enhanced detector systemJ A WOOLLAM CO INC·Filed 2018·Granted Jul 2, 2019·3 cites·20 claims
- 0687US8436994B2Fast sample height, AOI and POI alignment in mapping ellipsometer or the likeLIPHARDT MARTIN M·Filed 2011·Granted May 7, 2013·7 cites·7 claims
- 0786US8531665B1Small volume cellPFEIFFER GALEN L·Filed 2010·Granted Sep 10, 2013·6 cites·6 claims
- 0885US9500843B1Beam focusing and beam collecting opticsJ A WOOLLAM CO INC·Filed 2016·Granted Nov 22, 2016·4 cites·5 claims
- 0985US7872751B2Fast sample height, AOI and POI alignment in mapping ellipsometer or the likeJ A WOOLLAM CO INC·Filed 2008·Granted Jan 18, 2011·10 cites·29 claims
- 1084US7817266B2Small volume cellJ A WOOLLAM CO INC·Filed 2008·Granted Oct 19, 2010·7 cites·11 claims
- 1182US12405210B1System for, and calibration and testing of directed beam ellipsometer systemsJ A WOOLLAM CO INC·Filed 2023·Granted Sep 2, 2025·0 cites·4 claims
- 1282US8953030B1System for viewing samples that are undergoing ellipsometric investigation in real timeLIPHARDT MARTIN M·Filed 2012·Granted Feb 10, 2015·4 cites·4 claims
- 1382US7821637B1System for controlling intensity of a beam of electromagnetic radiation and method for investigating materials with low specular reflectance and/or are depolarizingJ A WOOLLAM CO INC·Filed 2008·Granted Oct 26, 2010·8 cites·3 claims
- 1482US7158231B1Spectroscopic ellipsometer and polarimeter systemsJ A WOOLLAM CO INC·Filed 2003·Granted Jan 2, 2007·26 cites·28 claims
- 1581US10989601B1Beam focusing and reflective opticsJ A WOOLLAM CO INC·Filed 2020·Granted Apr 27, 2021·1 cites·17 claims
- 1681US9442016B2Reflective focusing opticsJ A WOOLLAM CO INC·Filed 2014·Granted Sep 13, 2016·4 cites·18 claims
- 1781US8493565B1Small volume cellPFEIFFER GALEN L·Filed 2012·Granted Jul 23, 2013·4 cites·12 claims
- 1880US9921395B1Beam focusing and beam collecting optics with wavelength dependent filter element adjustment of beam areaJ A WOOLLAM CO INC·Filed 2016·Granted Mar 20, 2018·3 cites·38 claims
- 1980US7274450B1Sample entry purge system in spectrophotometer, ellipsometer, polarimeter and the like systemsJ A WOOLLAM CO INC·Filed 2004·Granted Sep 25, 2007·19 cites·9 claims
- 2078US10018815B1Beam focusing and reflective opticsJ A WOOLLAM CO INC·Filed 2018·Granted Jul 10, 2018·1 cites·10 claims
- 2178US7136172B1System and method for setting and compensating errors in AOI and POI of a beam of EM radiationJ A WOOLLAM CO INC·Filed 2004·Granted Nov 14, 2006·15 cites·18 claims
- 2277US8130375B1Small volume cellPFEIFFER GALEN L·Filed 2009·Granted Mar 6, 2012·5 cites·11 claims
- 2376US10444140B1Theta-theta sample positioning stage with application to sample mapping using reflectometer, spectrophotometer or ellipsometer systemHOVORKA GRIFFIN A P·Filed 2019·Granted Oct 15, 2019·1 cites·16 claims
- 2475US7796260B1System and method of controlling intensity of an electromagnetic beamJ A WOOLLAM CO INC·Filed 2007·Granted Sep 14, 2010·4 cites·10 claims
- 2575US7349092B1System for reducing stress induced effects during determination of fluid optical constantsJ A WOOLLAM CO INC·Filed 2005·Granted Mar 25, 2008·4 cites·18 claims
- 2673US8749782B1DLP base small spot investigation systemLIPHARDT MARTIN M·Filed 2011·Granted Jun 10, 2014·3 cites·15 claims
- 2773US7327456B1Spectrophotometer, ellipsometer, polarimeter and the like systemsJ A WOOLLAM CO INC·Filed 2005·Granted Feb 5, 2008·7 cites·9 claims
- 2872US12332163B1System for, and calibration and testing of directed beam ellipsometer systemsJ A WOOLLAM CO INC·Filed 2021·Granted Jun 17, 2025·0 cites·21 claims
- 2972US7136162B1Alignment of ellipsometer beam to sample surfaceJ A WOOLLAM CO INC·Filed 2003·Granted Nov 14, 2006·10 cites·18 claims
- 3071US10859439B1Reflectometer, spectrophotometer, ellipsometer or polarimeter system including sample imaging system that simultaneously meets scheimpflug condition and overcomes keystone errorJ A WOOLLAM CO INC·Filed 2016·Granted Dec 8, 2020·2 cites·1 claims
- 3170US7265835B1System for implementing variable retarder capability in ellipsometer, polarimeter or the like systemsJ A WOOLLAM CO INC·Filed 2006·Granted Sep 4, 2007·5 cites·16 claims
- 3267US9347768B1In line ellipsometer system and method of usePFEIFFER GALEN L·Filed 2012·Granted May 24, 2016·2 cites·6 claims
- 3367US7535566B1Beam chromatic shifting and directing meansJ A WOOLLAM CO INC·Filed 2006·Granted May 19, 2009·4 cites·11 claims
- 3462US7099006B1Ellipsometer or polarimeter and the like system with beam chromatic shifting and directing meansJ A WOOLLAM CO INC·Filed 2003·Granted Aug 29, 2006·3 cites·23 claims
- 3559US7830512B2System and method for controlling intensity of a beam of electromagnetic radiation in ellipsometers and polarimetersJ A WOOLLAM CO INC·Filed 2008·Granted Nov 9, 2010·2 cites·13 claims
- 3652US11885738B1Reflectometer, spectrophotometer, ellipsometer or polarimeter system including sample imaging system that simultaneously meet the scheimpflug condition and overcomes keystone errorLIPHARDT MARTIN M·Filed 2020·Granted Jan 30, 2024·0 cites·15 claims
- 3749US7317529B1Aspects of producing, directing, conditioning, impinging and detecting spectroscopic electromagnetic radiation from small spots on samplesJ A WOOLLAM CO INC·Filed 2004·Granted Jan 8, 2008·2 cites·28 claims
- 3846US7508510B2System for and method of investigating the exact same point on a sample substrate with multiple wavelengthsJ A WOOLIAM CO INC·Filed 2006·Granted Mar 24, 2009·1 cites·20 claims
- 3942US7301631B1Control of uncertain angle of incidence of beam from Arc lampJ A WOOLLAM CO INC·Filed 2005·Granted Nov 27, 2007·0 cites·12 claims
- 4039US10775298B1Ellipsometer or polarimeter system having at least one rotating element which is driven by a motor comprising air bearingHASSLER CHRISTOPHER D·Filed 2019·Granted Sep 15, 2020·0 cites·11 claims
- 4136US9658151B2System for viewing samples that are undergoing ellipsometric investigation in real timeLIPHARDT MARTIN M·Filed 2015·Granted May 23, 2017·0 cites·6 claims
- 4236US9360369B1System for determining average ellipsometric parameters for planar or non-planar shaped objects, and method of its useJ A WOOLLAM CO INC·Filed 2015·Granted Jun 7, 2016·0 cites·5 claims
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