Inventor · disambiguated record
Robert N. Lang
Also filed as: LANG ROBERT N · LANG ROBERT NEAL
13 granted patents·313 citations·filing 1990–2004
93Inventor score
Top patents by PatentIndex Score
13 records- 0195US6420084B1Mask-making using resist having SIO bond-containing polymerIBM·Filed 2000·Granted Jul 16, 2002·83 cites·28 claims
- 0281US5976710ALow TCE polyimides as improved insulator in multilayer interconnect structuresIBM·Filed 1997·Granted Nov 2, 1999·72 cites·31 claims
- 0380US6653045B2Radiation sensitive silicon-containing negative resists and use thereofIBM·Filed 2001·Granted Nov 25, 2003·15 cites·16 claims
- 0478US5240812ATop coat for acid catalyzed resistsIBM·Filed 1991·Granted Aug 31, 1993·35 cites·8 claims
- 0577US5399462AMethod of forming sub-half micron patterns with optical lithography using bilayer resist compositions comprising a photosensitive polysilsesquioxaneIBM·Filed 1994·Granted Mar 21, 1995·33 cites·11 claims
- 0673US6821718B2Radiation sensitive silicon-containing negative resists and use thereofIBM·Filed 2003·Granted Nov 23, 2004·10 cites·18 claims
- 0769US6730445B2Attenuated embedded phase shift photomask blanksIBM·Filed 2002·Granted May 4, 2004·8 cites·21 claims
- 0865US5115090AViscosity stable, essentially gel-free polyamic acid compositionsSACHDEV KRISHNA G·Filed 1990·Granted May 19, 1992·39 cites·13 claims
- 0964US6682860B2Attenuated embedded phase shift photomask blanksIBM·Filed 2002·Granted Jan 27, 2004·7 cites·23 claims
- 1060US6586156B2Etch improved resist systems containing acrylate (or methacrylate) silane monomersIBM·Filed 2001·Granted Jul 1, 2003·6 cites·23 claims
- 1157US7638266B2Ultrathin polymeric photoacid generator layer and method of fabricating at least one of a device and a mask by using said layerIBM·Filed 2004·Granted Dec 29, 2009·4 cites·23 claims
- 1249US6979518B2Attenuated embedded phase shift photomask blanksIBM·Filed 2003·Granted Dec 27, 2005·0 cites·21 claims
- 1348US7314700B2High sensitivity resist compositions for electron-based lithographyIBM·Filed 2002·Granted Jan 1, 2008·1 cites·14 claims
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