Inventor · disambiguated record
Manabu Toguchi
Also filed as: TOGUCHI MANABU
9 granted patents·1 pending application·198 citations·filing 1995–2010
88Inventor score
Top patents by PatentIndex Score
10 records- 0190US6204912B1Exposure method, exposure apparatus, and maskNIKON CORP·Filed 1997·Granted Mar 20, 2001·90 cites·22 claims
- 0288US7864293B2Exposure apparatus, exposure method, and producing method of microdeviceNIKON CORP·Filed 2006·Granted Jan 4, 2011·10 cites·50 claims
- 0379US5912726AProjection exposure apparatus and method having a positional deviation detection system that employs light from an exposure illumination systemNIKON CORP·Filed 1997·Granted Jun 15, 1999·47 cites·31 claims
- 0467US8699001B2Object moving apparatus, object processing apparatus, exposure apparatus, object inspecting apparatus and device manufacturing methodAOKI YASUO·Filed 2010·Granted Apr 15, 2014·2 cites·34 claims
- 0551US6873400B2Scanning exposure method and systemNIKON CORP·Filed 2001·Granted Mar 29, 2005·4 cites·24 claims
- 0648US5859690AMethod of dividing and exposing patternsNIKON CORP·Filed 1997·Granted Jan 12, 1999·17 cites·15 claims
- 0746US6506544B1Exposure method and exposure apparatus and maskNIKON CORP·Filed 1999·Granted Jan 14, 2003·11 cites·10 claims
- 0845US5532822AMethod of measuring orthogonality of stage unitNIKON CORP·Filed 1995·Granted Jul 2, 1996·17 cites·3 claims
- 0937US2011042874A1Object processing apparatus, exposure apparatus and exposure method, and device manufacturing methodNIKON CORP·Filed 2010·Application pending·0 cites
- 1034US6538724B1Exposure apparatusNIKON CORP·Filed 2000·Granted Mar 25, 2003·0 cites·19 claims
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