Inventor · disambiguated record
Susumu Goto
Also filed as: GOTO SUSUMU
17 granted patents·322 citations·filing 1976–2011
94Inventor score
Top patents by PatentIndex Score
17 records- 0195US5864142AElectron beam exposure apparatus and method of controlling sameCANON KK·Filed 1997·Granted Jan 26, 1999·108 cites·36 claims
- 0290US5929454APosition detection apparatus, electron beam exposure apparatus, and methods associated with themCANON KK·Filed 1997·Granted Jul 27, 1999·71 cites·36 claims
- 0378US9714410B2Cell culture method and utilization of the sameGOTO SUSUMU·Filed 2005·Granted Jul 25, 2017·9 cites·5 claims
- 0478US7385194B2Charged particle beam application systemHITACHI HIGH TECH CORP·Filed 2006·Granted Jun 10, 2008·6 cites·19 claims
- 0571US4812662AAlignment system using an electron beamCANON KK·Filed 1987·Granted Mar 14, 1989·24 cites·3 claims
- 0670USPP16588P2Petunia plant named ‘Temari’GOTO KOJI·Filed 2004·Granted May 30, 2006·1 cites·1 claims
- 0770US4086295APolyamide compositionASAHI CHEMICAL IND·Filed 1976·Granted Apr 25, 1978·25 cites·17 claims
- 0869US7960703B2Charged-particle beam lithography apparatus and device manufacturing methodCANON KK·Filed 2008·Granted Jun 14, 2011·2 cites·5 claims
- 0966US5323530AApparatus for assembling rotorsMITSUBISHI MATERIALS CORP·Filed 1993·Granted Jun 28, 1994·19 cites·10 claims
- 1063US7041988B2Electron beam exposure apparatus and electron beam processing apparatusHITACHI LTD·Filed 2003·Granted May 9, 2006·8 cites·16 claims
- 1161US6831260B2Electron beam exposure apparatus, reduction projection system, and device manufacturing methodCANON KK·Filed 2002·Granted Dec 14, 2004·4 cites·15 claims
- 1261US4785187AAlignment deviceCANON KK·Filed 1987·Granted Nov 15, 1988·25 cites·6 claims
- 1349US8228547B2Image source apparatus and method of acquiring information from printerTANIMOTO AKIHITO·Filed 2007·Granted Jul 24, 2012·1 cites·14 claims
- 1443USPP23055P2Petunia plant named ‘Hoobenihime’GOTO KOJI·Filed 2011·Granted Sep 18, 2012·0 cites·1 claims
- 1542US6452193B1Electron beam exposure apparatus, electron lens, and device manufacturing methodCANON KK·Filed 1999·Granted Sep 17, 2002·8 cites·19 claims
- 1642US6246065B1Electron beam projection exposure apparatusCANON KK·Filed 1998·Granted Jun 12, 2001·5 cites·11 claims
- 1738US7034314B2Projection apparatus for projecting a pattern formed on a mask onto a substrate and a control method for a projection apparatusCANON KK·Filed 1999·Granted Apr 25, 2006·6 cites·28 claims
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