Inventor · disambiguated record
Hiromasa Yonekura
Also filed as: YONEKURA HIROMASA
1 granted patent·1 pending application·3 citations·filing 2014–2016
22Inventor score
Files withTOKYO ELECTRON LTD2
Top patents by PatentIndex Score
2 records- 0185US9540743B2Amorphous silicon crystallizing method, crystallized silicon film forming method, semiconductor device manufacturing method and film forming apparatusTOKYO ELECTRON LTD·Filed 2014·Granted Jan 10, 2017·3 cites·8 claims
- 0231US2016244892A1Method for Crystallizing Group IV Semiconductor, and Film Forming ApparatusTOKYO ELECTRON LTD·Filed 2016·Application pending·0 cites
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