Inventor · disambiguated record
Abdul Rahim Forouhi
Also filed as: FOROUHI ABDUL R · FOROUHI ABDUL RAHIM
42 granted patents·1 pending application·1,937 citations·filing 1984–2009
99Inventor score
Top patents by PatentIndex Score
43 records- 0194US6392756B1Method and apparatus for optically determining physical parameters of thin films deposited on a complex substrateN & K TECHNOLOGY INC·Filed 1999·Granted May 21, 2002·123 cites·56 claims
- 0293US6128085AReflectance spectroscopic apparatus with toroidal mirrorsN & K TECHNOLOGY INC·Filed 1999·Granted Oct 3, 2000·118 cites·16 claims
- 0393US4618541AMethod of forming a silicon nitride film transparent to ultraviolet radiation and resulting articleADVANCED MICRO DEVICES INC·Filed 1984·Granted Oct 21, 1986·106 cites·22 claims
- 0492US5614756AMetal-to-metal antifuse with conductiveACTEL CORP·Filed 1994·Granted Mar 25, 1997·119 cites·23 claims
- 0591US5272101AElectrically programmable antifuse and fabrication processesACTEL CORP·Filed 1991·Granted Dec 21, 1993·99 cites·7 claims
- 0690US5171715AProcess for fabricating electrically programmable antifuse elementACTEL CORP·Filed 1992·Granted Dec 15, 1992·90 cites·3 claims
- 0789US7999936B1Combined transmittance and angle selective scattering measurement of fluid suspended particles for simultaneous determination of refractive index, extinction coefficient, particle size and particle densityN & K TECHNOLOGY INC·Filed 2009·Granted Aug 16, 2011·16 cites·4 claims
- 0889US4905170AMethod and apparatus of determining optical constants of amorphous semiconductors and dielectricsFOROUHI ABDUL R·Filed 1988·Granted Feb 27, 1990·162 cites·23 claims
- 0987US6710865B2Method of inferring optical parameters outside of a measurement spectral rangeN & K TECHNOLOGY INC·Filed 2001·Granted Mar 23, 2004·39 cites·18 claims
- 1087US6091485AMethod and apparatus for optically determining physical parameters of underlayersN & K TECHNOLOGY INC·Filed 1999·Granted Jul 18, 2000·78 cites·25 claims
- 1187US5670818AElectrically programmable antifuseACTEL CORP·Filed 1994·Granted Sep 23, 1997·73 cites·16 claims
- 1286US5404029AElectrically programmable antifuse elementACTEL CORP·Filed 1991·Granted Apr 4, 1995·68 cites·20 claims
- 1385US6379014B1Graded anti-reflective coatings for photolithographyN & K TECHNOLOGY INC·Filed 2000·Granted Apr 30, 2002·26 cites·12 claims
- 1485US5991022AReflectance spectrophotometric apparatus with toroidal mirrorsN & K TECHNOLOGY INC·Filed 1998·Granted Nov 23, 1999·65 cites·26 claims
- 1584US6327035B1Method and apparatus for optically examining miniature patternsN & K TECHNOLOGY INC·Filed 1999·Granted Dec 4, 2001·53 cites·26 claims
- 1684US5181096AElectrically programmable antifuse incorporating dielectric and amorphous silicon interlayerACTEL CORP·Filed 1990·Granted Jan 19, 1993·84 cites·48 claims
- 1783US7289214B1System and method for measuring overlay alignment using diffraction gratingsN & K TECHNOLOGY INC·Filed 2004·Granted Oct 30, 2007·23 cites·22 claims
- 1881US6594025B2Method of monitoring thin-film processes and metrology tool thereofN & K TECHNOLOGY INC·Filed 2001·Granted Jul 15, 2003·24 cites·22 claims
- 1980US5770885AElectrically programmable antifuse incorporating dielectric and amorphous silicon interlayersACTEL CORP·Filed 1996·Granted Jun 23, 1998·51 cites·38 claims
- 2080US5763898AAbove via metal-to-metal antifuses incorporating a tungsten via plugACTEL CORP·Filed 1996·Granted Jun 9, 1998·52 cites·8 claims
- 2179US5880831AReflectance spectrophotometric apparatus with optical relayN & K TECHNOLOGY INC·Filed 1997·Granted Mar 9, 1999·54 cites·20 claims
- 2279US5780323AFabrication method for metal-to-metal antifuses incorporating a tungsten via plugACTEL CORP·Filed 1996·Granted Jul 14, 1998·56 cites·16 claims
- 2378US5373169ALow-temperature process metal-to-metal antifuse employing silicon linkACTEL CORP·Filed 1992·Granted Dec 13, 1994·49 cites·12 claims
- 2477US7349103B1System and method for high intensity small spot optical metrologyN & K TECHNOLOGY INC·Filed 2005·Granted Mar 25, 2008·10 cites·30 claims
- 2577US5387812AElectrically programmable antifuse having a metal to metal structureACTEL CORP·Filed 1992·Granted Feb 7, 1995·43 cites·2 claims
- 2672US5411917AElectrically programmable antifuse incorporating dielectric and amorphous silicon interlayerACTEL CORP·Filed 1993·Granted May 2, 1995·39 cites·21 claims
- 2771US6825933B2Computer-implemented reflectance system and method for non-destructive low dose ion implantation monitoringN & K TECHNOLOGY INC·Filed 2002·Granted Nov 30, 2004·9 cites·38 claims
- 2870US7253909B1Phase shift measurement using transmittance spectraN & K TECHNOLOGY INC·Filed 2005·Granted Aug 7, 2007·2 cites·24 claims
- 2968US6075612AOptical devices having toroidal mirrors for performing reflectance measurementsN & K TECHNOLOGY INC·Filed 1999·Granted Jun 13, 2000·29 cites·30 claims
- 3067US7248364B2Apparatus and method for optical characterization of a sample over a broadband of wavelengths with a small spot sizeN & K TECHNOLOGY INC·Filed 2003·Granted Jul 24, 2007·11 cites·34 claims
- 3167US6891628B2Method and apparatus for examining features on semi-transparent and transparent substratesN & K TECHNOLOGY INC·Filed 2003·Granted May 10, 2005·5 cites·34 claims
- 3264US7397030B1Integrated local and global optical metrology for samples having miniature featuresN & K TECHNOLOGY INC·Filed 2006·Granted Jul 8, 2008·3 cites·46 claims
- 3363US5482884ALow-temperature process metal-to-metal antifuse employing silicon linkACTEL CORP·Filed 1994·Granted Jan 9, 1996·26 cites·2 claims
- 3463US5369054ACircuits for ESD protection of metal-to-metal antifuses during processingACTEL CORP·Filed 1993·Granted Nov 29, 1994·25 cites·4 claims
- 3562US5552627AElectrically programmable antifuse incorporating dielectric and amorphous silicon interlayersACTEL CORP·Filed 1994·Granted Sep 3, 1996·26 cites·18 claims
- 3661US5578836AElectrically programmable antifuse elementACTEL CORP·Filed 1994·Granted Nov 26, 1996·22 cites·28 claims
- 3755US7327457B2Apparatus and method for optical characterization of a sample over a broadband of wavelengths while minimizing polarization changesN & K TECHNOLOGY INC·Filed 2003·Granted Feb 5, 2008·5 cites·34 claims
- 3854US5510646AMetal-to-metal antifuse with improved diffusion barrier layerACTEL CORP·Filed 1993·Granted Apr 23, 1996·20 cites·2 claims
- 3946US5825072ACircuits for ESD Protection of metal to-metal antifuses during processingACTEL CORP·Filed 1996·Granted Oct 20, 1998·11 cites·6 claims
- 4046US5753528AMethod of fabricating metal-to-metal antifuse with improved diffusion barrier layerACTEL CORP·Filed 1995·Granted May 19, 1998·12 cites·4 claims
- 4145US7330256B1Spectrophotometric system with reduced angle of incidenceN & K TECHNOLOGY INC·Filed 2005·Granted Feb 12, 2008·0 cites·5 claims
- 4245US5519248ACircuits for ESD protection of metal-to-metal antifuses during processingACTEL CORP·Filed 1994·Granted May 21, 1996·11 cites·8 claims
- 4340US2002097493A1Graded anti-reflective coatings for photolithographyFiled 2001·Application pending·0 cites
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