Inventor · disambiguated record
Shuqiang Chen
Also filed as: CHEN SHUQIANG
7 granted patents·1 pending application·87 citations·filing 2002–2020
84Inventor score
Top patents by PatentIndex Score
8 records- 0192US7525672B1Efficient characterization of symmetrically illuminated symmetric 2-D gratingsN & K TECHNOLOGY INC·Filed 2005·Granted Apr 28, 2009·23 cites·42 claims
- 0283US7391524B1System and method for efficient characterization of diffracting structures with incident plane parallel to grating linesN & K TECHNOLOGY INC·Filed 2004·Granted Jun 24, 2008·30 cites·35 claims
- 0383US7289214B1System and method for measuring overlay alignment using diffraction gratingsN & K TECHNOLOGY INC·Filed 2004·Granted Oct 30, 2007·23 cites·22 claims
- 0475US7505147B1Efficient calculation of grating matrix elements for 2-D diffractionN & K TECHNOLOGY INC·Filed 2006·Granted Mar 17, 2009·4 cites·18 claims
- 0570US7253909B1Phase shift measurement using transmittance spectraN & K TECHNOLOGY INC·Filed 2005·Granted Aug 7, 2007·2 cites·24 claims
- 0664US7212293B1Optical determination of pattern feature parameters using a scalar model having effective optical propertiesN & K TECHNOLOGY INC·Filed 2004·Granted May 1, 2007·5 cites·28 claims
- 0738US10944483B2Reflection-type coherent optical communication system combined with unidirectional optical signal amplificationUNIV ELECTRONIC SCI & TECH CHINA·Filed 2020·Granted Mar 9, 2021·0 cites·5 claims
- 0832US2003175030A1Re-configurable optical add/drop multiplexer module and methodFiled 2002·Application pending·0 cites
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