Inventor · disambiguated record
Kouros Ghandehari
Also filed as: GHANDEHARI KOUROS
38 granted patents·1 pending application·965 citations·filing 1997–2011
98Inventor score
Files withADVANCED MICRO DEVICES INC22SPANSION LLC7VLSI TECHNOLOGY INC3KONINKL PHILIPS ELECTRONICS NV2GHANDEHARI KOUROS1
Top patents by PatentIndex Score
39 records- 0198US6994939B1Semiconductor manufacturing resolution enhancement system and method for simultaneously patterning different feature typesADVANCED MICRO DEVICES INC·Filed 2002·Granted Feb 7, 2006·228 cites·28 claims
- 0296US6475867B1Method of forming integrated circuit features by oxidation of titanium hard maskADVANCED MICRO DEVICES INC·Filed 2001·Granted Nov 5, 2002·125 cites·20 claims
- 0394US6818141B1Application of the CVD bilayer ARC as a hard mask for definition of the subresolution trench features between polysilicon wordlinesADVANCED MICRO DEVICES INC·Filed 2002·Granted Nov 16, 2004·72 cites·19 claims
- 0493US6645679B1Attenuated phase shift mask for use in EUV lithography and a method of making such a maskADVANCED MICRO DEVICES INC·Filed 2001·Granted Nov 11, 2003·51 cites·20 claims
- 0590US6653190B1Flash memory with controlled wordline widthADVANCED MICRO DEVICES INC·Filed 2001·Granted Nov 25, 2003·44 cites·20 claims
- 0689US6902851B1Method for using phase-shifting maskADVANCED MICRO DEVICES INC·Filed 2002·Granted Jun 7, 2005·35 cites·23 claims
- 0788US6642148B1RELACS shrink method applied for single print resist mask for LDD or buried bitline implants using chemically amplified DUV type photoresistADVANCED MICRO DEVICES INC·Filed 2002·Granted Nov 4, 2003·46 cites·16 claims
- 0887US6500587B1Binary and attenuating phase-shifting masks for multiple wavelengthsADVANCED MICRO DEVICES INC·Filed 2001·Granted Dec 31, 2002·27 cites·20 claims
- 0985US7538026B1Multilayer low reflectivity hard mask and process thereforADVANCED MICRO DEVICES INC·Filed 2005·Granted May 26, 2009·8 cites·23 claims
- 1082US6589717B1Photon assisted deposition of hard mask formation for use in manufacture of both devices and masksADVANCED MICRO DEVICES INC·Filed 2000·Granted Jul 8, 2003·20 cites·20 claims
- 1180US6410421B1Semiconductor device with anti-reflective structure and methods of manufactureKONINKL PHILIPS ELECTRONICS NV·Filed 2000·Granted Jun 25, 2002·21 cites·20 claims
- 1278US6962849B1Hard mask spacer for sublithographic bitlineADVANCED MICRO DEVICES INC·Filed 2003·Granted Nov 8, 2005·21 cites·31 claims
- 1377US6872609B1Narrow bitline using Safier for mirrorbitADVANCED MICRO DEVICES INC·Filed 2004·Granted Mar 29, 2005·20 cites·27 claims
- 1474US6057587ASemiconductor device with anti-reflective structureVLSI TECHNOLOGY INC·Filed 1997·Granted May 2, 2000·37 cites·24 claims
- 1572US6894342B1Structure and method for preventing UV radiation damage in a memory cell and improving contact CD controlSPANSION LLC·Filed 2003·Granted May 17, 2005·18 cites·12 claims
- 1672US6501555B1Optical technique to detect etch process terminationADVANCED MICRO DEVICES INC·Filed 2001·Granted Dec 31, 2002·14 cites·13 claims
- 1771US6867063B1Organic spin-on anti-reflective coating over inorganic anti-reflective coatingADVANCED MICRO DEVICES INC·Filed 2002·Granted Mar 15, 2005·13 cites·10 claims
- 1867US6833581B1Structure and method for preventing process-induced UV radiation damage in a memory cellSPANSION LLC·Filed 2003·Granted Dec 21, 2004·13 cites·13 claims
- 1966US7070911B1Structure and method for reducing standing waves in a photoresistADVANCED MICRO DEVICES INC·Filed 2003·Granted Jul 4, 2006·8 cites·18 claims
- 2066US6673524B2Attenuating extreme ultraviolet (EUV) phase-shifting mask fabrication methodFiled 2001·Granted Jan 6, 2004·8 cites·15 claims
- 2166US6667212B1Alignment system for planar charge trapping dielectric memory cell lithographyADVANCED MICRO DEVICES INC·Filed 2003·Granted Dec 23, 2003·13 cites·24 claims
- 2266US6620717B1Memory with disposable ARC for wordline formationADVANCED MICRO DEVICES INC·Filed 2002·Granted Sep 16, 2003·10 cites·20 claims
- 2366US6433854B2Method of illumination uniformity in photolithographic systemsKONINKL PHILIPS ELECTRONICS NV·Filed 2001·Granted Aug 13, 2002·7 cites·16 claims
- 2464US5952135AMethod for alignment using multiple wavelengths of lightVLSI TECHNOLOGY·Filed 1997·Granted Sep 14, 1999·23 cites·19 claims
- 2563US6528398B1Thinning of trench and line or contact spacing by use of dual layer photoresistADVANCED MICRO DEVICES INC·Filed 2001·Granted Mar 4, 2003·8 cites·20 claims
- 2663US6403500B1Cross-shaped resist dispensing system and methodADVANCED MICRO DEVICES INC·Filed 2001·Granted Jun 11, 2002·8 cites·20 claims
- 2763US5852497AMethod and apparatus for detecting edges under an opaque layerVLSI TECHNOLOGY INC·Filed 1997·Granted Dec 22, 1998·18 cites·11 claims
- 2860US7977797B2Integrated circuit with contact region and multiple etch stop insulation layerSPANSION LLC·Filed 2009·Granted Jul 12, 2011·1 cites·15 claims
- 2959US8048797B2Multilayer low reflectivity hard mask and process thereforADVANCED MICRO DEVICES INC·Filed 2009·Granted Nov 1, 2011·0 cites·10 claims
- 3059US7507661B2Method of forming narrowly spaced flash memory contact openings and lithography masksSPANSION LLC·Filed 2004·Granted Mar 24, 2009·6 cites·8 claims
- 3157US6313542B1Method and apparatus for detecting edges under an opaque layerVLSI TECHNOLOGY INC·Filed 1998·Granted Nov 6, 2001·14 cites·6 claims
- 3252US6720133B1Memory manufacturing process using disposable ARC for wordline formationADVANCED MICRO DEVICES INC·Filed 2002·Granted Apr 13, 2004·10 cites·20 claims
- 3350US7572727B1Semiconductor formation method that utilizes multiple etch stop layersSPANSION LLC·Filed 2004·Granted Aug 11, 2009·3 cites·15 claims
- 3450US6262795B1Apparatus and method for the improvement of illumination uniformity in photolithographic systemsPHILIP SEMICONDUCTORS INC·Filed 1998·Granted Jul 17, 2001·12 cites·25 claims
- 3549US7361587B1Semiconductor contact and nitride spacer formation system and methodSPANSION LLC·Filed 2004·Granted Apr 22, 2008·3 cites·16 claims
- 3647US8309457B2Multilayer low reflectivity hard mask and process thereforGHANDEHARI KOUROS·Filed 2011·Granted Nov 13, 2012·0 cites·10 claims
- 3743US7888269B2Triple layer anti-reflective hard maskSPANSION LLC·Filed 2005·Granted Feb 15, 2011·0 cites·10 claims
- 3840US6664030B1System for and method of constructing an alternating phase-shifting maskADVANCED MICRO DEVICES INC·Filed 2001·Granted Dec 16, 2003·0 cites·20 claims
- 3937US2003087529A1Hard mask removal processFiled 2001·Application pending·0 cites
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