Inventor · disambiguated record
Toru Shirasaki
Also filed as: SHIRASAKI TORU
37 granted patents·16 pending applications·294 citations·filing 1994–2022
97Inventor score
Top patents by PatentIndex Score
53 records- 0195US7311378B2Wiping apparatus and imaging apparatus provided therewith, method of manufacturing electro-optical device, electro-optical device, and electronic apparatusSEIKO EPSON CORP·Filed 2005·Granted Dec 25, 2007·28 cites·6 claims
- 0292US6593034B1Framed pellicle for protection of photolithographic photomaskSHINETSU CHEMICAL CO·Filed 2000·Granted Jul 15, 2003·41 cites·2 claims
- 0387US10088745B2Pellicle for EUV exposureSHINETSU CHEMICAL CO·Filed 2016·Granted Oct 2, 2018·3 cites·13 claims
- 0487US8383297B2Pellicle for lithography and method for manufacturing pellicle filmSHINETSU CHEMICAL CO·Filed 2011·Granted Feb 26, 2013·5 cites·8 claims
- 0585US8221945B2Pellicle frame and lithographic pellicleSHIRASAKI TORU·Filed 2010·Granted Jul 17, 2012·5 cites·20 claims
- 0685US8221944B2Pellicle frame and lithographic pellicleSHIRASAKI TORU·Filed 2010·Granted Jul 17, 2012·8 cites·12 claims
- 0784US10029560B2Fuel supply apparatusTOYODA GOSEI KK·Filed 2016·Granted Jul 24, 2018·4 cites·13 claims
- 0884US8173330B2PellicleSHIRASAKI TORU·Filed 2010·Granted May 8, 2012·4 cites·7 claims
- 0981US8652711B2Pellicle for lithographySHIRASAKI TORU·Filed 2011·Granted Feb 18, 2014·3 cites·4 claims
- 1081US7901841B2Pellicle for photolithographySHINETSU CHEMICAL CO·Filed 2007·Granted Mar 8, 2011·5 cites·2 claims
- 1181US6368683B1Pellicle for photolithographySHINETSU CHEMICAL CO·Filed 2000·Granted Apr 9, 2002·18 cites·11 claims
- 1279US5470621AFrame-supported pellicle for dustproof protection of photomaskSHINETSU CHEMICAL CO·Filed 1994·Granted Nov 28, 1995·34 cites·5 claims
- 1378US6639650B2Light exposure method, light exposure apparatus, pellicle and method for relieving warpage of pellicle membraneSHINETSU CHEMICAL CO·Filed 2000·Granted Oct 28, 2003·20 cites·10 claims
- 1477US5616927AFrame-supported pellicle for dustproof protection of photomaskSHINETSU CHEMICAL CO·Filed 1994·Granted Apr 1, 1997·30 cites·3 claims
- 1576US5693382AFrame-supported pellicle for dustproof protection of photomask in photolithographySHINETSU CHEMICAL CO·Filed 1996·Granted Dec 2, 1997·36 cites·4 claims
- 1674US8394557B2Lithographic pellicleSHIRASAKI TORU·Filed 2010·Granted Mar 12, 2013·2 cites·4 claims
- 1773US8582077B2Pellicle, mounting method therefor, pellicle-equipped mask, and maskSHIRASAKI TORU·Filed 2011·Granted Nov 12, 2013·2 cites·8 claims
- 1871US8356849B2Pellicle handling toolSHINETSU CHEMICAL CO·Filed 2011·Granted Jan 22, 2013·5 cites·4 claims
- 1971US6803161B2Framed pellicle for protection of photolithographic photomaskSHINETSU CHEMICAL CO·Filed 2003·Granted Oct 12, 2004·9 cites·4 claims
- 2069US8349526B2Pellicle for lithographySHINETSU CHEMICAL CO·Filed 2011·Granted Jan 8, 2013·1 cites·4 claims
- 2164US10421353B2Fuel supply apparatusTOYODA GOSEI KK·Filed 2016·Granted Sep 24, 2019·1 cites·5 claims
- 2264US7914952B2Lithographic pellicleSHINETSU CHEMICAL CO·Filed 2008·Granted Mar 29, 2011·1 cites·1 claims
- 2360US5419972AFrame-supported pellicle for dustproof protection of photomaskSHINETSU CHEMICAL CO·Filed 1994·Granted May 30, 1995·15 cites·2 claims
- 2460US2024192586A1Pellicle Frame Laminate and Method for Manufacturing Pellicle Using Said LaminateSHINETSU CHEMICAL CO·Filed 2022·Application pending·0 cites
- 2559US6806990B2Optical device and method for producing optical deviceSHINETSU CHEMICAL CO·Filed 2002·Granted Oct 19, 2004·6 cites·13 claims
- 2657US7968252B2Pellicle frameSHINETSU CHEMICAL CO·Filed 2008·Granted Jun 28, 2011·1 cites·4 claims
- 2756US9268213B2Pellicle for lithogrpahySHINETSU CHEMICAL CO·Filed 2013·Granted Feb 23, 2016·0 cites·2 claims
- 2854US6977126B2Pellicle, photomask, pellicle frame, and method for manufacturing pellicleSHINETSU CHEMICAL CO·Filed 2001·Granted Dec 20, 2005·3 cites·29 claims
- 2952US2012244477A1Pellicle for lithographySHIRASAKI TORU·Filed 2012·Application pending·0 cites
- 3052US2007238030A1Pellicle for lithographySHIRASAKI TORU·Filed 2007·Application pending·0 cites
- 3150US8426084B2Pellicle for lithographySHIRASAKI TORU·Filed 2010·Granted Apr 23, 2013·0 cites·5 claims
- 3249US9817308B2PellicleSHINETSU CHEMICAL CO·Filed 2016·Granted Nov 14, 2017·0 cites·8 claims
- 3349US2009286170A1PellicleSHINETSU CHEMICAL CO·Filed 2009·Application pending·0 cites
- 3449US2009286169A1Pellicle for use in semiconductor lithographySHINETSU CHEMICAL CO·Filed 2009·Application pending·0 cites
- 3547US8467035B2Pellicle frame and lithographic pellicleSHIRASAKI TORU·Filed 2010·Granted Jun 18, 2013·0 cites·12 claims
- 3647US8426083B2Pellicle for lithographySHIRASAKI TORU·Filed 2011·Granted Apr 23, 2013·0 cites·4 claims
- 3747US6736252B2Work holder for through hole examination apparatusSEIKO EPSON CORP·Filed 2001·Granted May 18, 2004·3 cites·14 claims
- 3847US2008248407A1PellicleSHINETSU CHEMICAL CO·Filed 2008·Application pending·0 cites
- 3947US2009191470A1Pellicle frameSHINETSU CHEMICAL CO·Filed 2008·Application pending·0 cites
- 4047US2008248406A1Pellicle and method for preparing the sameSHINETSU CHEMICAL CO·Filed 2008·Application pending·0 cites
- 4147US2009023082A1Pellicle frameSHINETSU CHEMICAL CO·Filed 2008·Application pending·0 cites
- 4246US8309279B2Pellicle for lithographySHIRASAKI TORU·Filed 2011·Granted Nov 13, 2012·0 cites·4 claims
- 4344US10634991B2Container for storing a pellicle for lithographySHINETSU CHEMICAL CO·Filed 2015·Granted Apr 28, 2020·0 cites·1 claims
- 4444US2007248919A1Lithographic pellicleSHIRASAKI TORU·Filed 2007·Application pending·0 cites
- 4541US8722285B2Pellicle for lithographyTSUKADA JUNICHI·Filed 2012·Granted May 13, 2014·0 cites·2 claims
- 4641US8220654B2Fuel tank structureSUDA TOURU·Filed 2009·Granted Jul 17, 2012·1 cites·10 claims
- 4740US8293433B2Pellicle for lithography and a method for making the sameTSUKADA JUNICHI·Filed 2010·Granted Oct 23, 2012·0 cites·13 claims
- 4839US2003127176A1Optical device, optical isolator and method for producing the sameSHINETSU CHEMICAL CO·Filed 2002·Application pending·0 cites
- 4938US2011027700A1PellicleSHINETSU CHEMICAL CO·Filed 2010·Application pending·0 cites
- 5038US2010279212A1PhotomaskSHINETSU CHEMICAL CO·Filed 2010·Application pending·0 cites
Showing the top 50 of 53 patent records by PatentIndex Score.
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →