Inventor · disambiguated record
Lisa Gytri
Also filed as: GYTRI LISA · GYTRI LISA MARIE
8 granted patents·65 citations·filing 2008–2018
86Inventor score
Top patents by PatentIndex Score
8 records- 0191US8608035B2Purge ring with split baffles for photonic thermal processing systemsLEE JAMES·Filed 2011·Granted Dec 17, 2013·9 cites·16 claims
- 0290US8398816B1Method and apparatuses for reducing porogen accumulation from a UV-cure chamberGYTRI LISA·Filed 2008·Granted Mar 19, 2013·25 cites·11 claims
- 0389US9073100B2Method and apparatuses for reducing porogen accumulation from a UV-cure chamberNOVELLUS SYSTEMS INC·Filed 2013·Granted Jul 7, 2015·8 cites·23 claims
- 0488US9028765B2Exhaust flow spreading baffle-riser to optimize remote plasma window cleanLAM RES CORP·Filed 2013·Granted May 12, 2015·9 cites·20 claims
- 0584US10332778B2Lift pin assembly and associated methodsLAM RES CORP·Filed 2015·Granted Jun 25, 2019·6 cites·23 claims
- 0682US8883406B2Method for using a purge ring with split baffles in photonic thermal processing systemsLAM RES CORP·Filed 2013·Granted Nov 11, 2014·6 cites·15 claims
- 0781US10020197B2Method for reducing porogen accumulation from a UV-cure chamberNOVELLUS SYSTEMS INC·Filed 2015·Granted Jul 10, 2018·2 cites·20 claims
- 0861US11177131B2Method and apparatuses for reducing porogen accumulation from a UV-cure chamberNOVELLUS SYSTEMS INC·Filed 2018·Granted Nov 16, 2021·0 cites·20 claims
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