Inventor · disambiguated record
Martin Schoenleber
Also filed as: SCHOENLEBER MARTIN
4 granted patents·16 citations·filing 2011–2015
69Inventor score
Top patents by PatentIndex Score
4 records- 0180US8716039B2Monitoring apparatus and method for in-situ measurement of wafer thicknesses for monitoring the thinning of semiconductor wafers and thinning apparatus comprising a wet etching apparatus and a monitoring apparatusDUSEMUND CLAUS·Filed 2011·Granted May 6, 2014·9 cites·20 claims
- 0274US8699038B2Apparatus and method for monitoring a thickness of a silicon wafer with a highly doped layerSCHOENLEBER MARTIN·Filed 2011·Granted Apr 15, 2014·5 cites·37 claims
- 0369US9230817B2Apparatus and method for monitoring a thickness of a silicon wafer with a highly doped layerPRECITEC OPTRONIK GMBH·Filed 2014·Granted Jan 5, 2016·2 cites·37 claims
- 0438US9770783B2Method for measuring the distance between a workpiece and a machining head of a laser machining apparatusPRECITEC OPTRONIK GMBH·Filed 2015·Granted Sep 26, 2017·0 cites·15 claims
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