Inventor · disambiguated record
Youichi Sasaki
Also filed as: SASAKI YOUICHI
9 granted patents·4 pending applications·42 citations·filing 2001–2017
86Inventor score
Top patents by PatentIndex Score
13 records- 0187US7420279B2Carbon containing silicon oxide film having high ashing tolerance and adhesionNEC ELECTRONICS CORP·Filed 2006·Granted Sep 2, 2008·13 cites·7 claims
- 0280US8455850B2Extreme ultraviolet light source apparatus and method of generating extreme ultraviolet lightENDO AKIRA·Filed 2012·Granted Jun 4, 2013·4 cites·22 claims
- 0377US8164076B2Extreme ultraviolet light source apparatus and method of generating extreme ultraviolet lightENDO AKIRA·Filed 2009·Granted Apr 24, 2012·9 cites·18 claims
- 0468US8710472B2Target output device and extreme ultraviolet light source apparatusISHIHARA TAKANOBU·Filed 2011·Granted Apr 29, 2014·3 cites·21 claims
- 0561US8604453B2Extreme ultraviolet light source apparatus and method of generating ultraviolet lightGIGAPHOTON INC·Filed 2013·Granted Dec 10, 2013·1 cites·22 claims
- 0660US7102236B2Carbon containing silicon oxide film having high ashing tolerance and adhesionNEC ELECTRONICS CORP·Filed 2004·Granted Sep 5, 2006·6 cites·11 claims
- 0752US7582970B2Carbon containing silicon oxide film having high ashing tolerance and adhesionNEC ELECTRONICS CORP·Filed 2008·Granted Sep 1, 2009·0 cites·7 claims
- 0852US6922428B2Gas laser apparatus for lithographyGIGAPHOTON INC·Filed 2003·Granted Jul 26, 2005·2 cites·16 claims
- 0951US7215695B2Discharge excitation type pulse laser apparatusGIGAPHOTON·Filed 2004·Granted May 8, 2007·4 cites·13 claims
- 1040US2002122449A1Gas laser apparatus for lithographyFiled 2001·Application pending·0 cites
- 1139US2013134326A1Extreme ultraviolet light generation apparatus, target collection device, and target collection methodYABU TAKAYUKI·Filed 2012·Application pending·0 cites
- 1237US2012085922A1Chamber apparatus and method of controlling movement of droplet in the chamber apparatusYABU TAKAYUKI·Filed 2011·Application pending·0 cites
- 1336US2018109065A1Amplifier and laser systemGIGAPHOTON INC·Filed 2017·Application pending·0 cites
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