Inventor · disambiguated record
Stephen Burgess
Also filed as: BURGESS STEPHEN · BURGESS STEPHEN R · BURGESS STEPHEN ROBERT
27 granted patents·6 pending applications·108 citations·filing 2000–2024
94Inventor score
Files withSPTS TECHNOLOGIES LTD19AVIZA TECHNOLOGY LTD2BURGESS STEPHEN R2TRIKON HOLDINGS LTD2AVIZA EUROP LTD1
Top patents by PatentIndex Score
33 records- 0197US7876257B2Method and apparatus for compressing SAR signalsMITSUBISHI ELECTRIC RES LAB·Filed 2008·Granted Jan 25, 2011·66 cites·36 claims
- 0290US11802341B2PE-CVD apparatus and methodSPTS TECHNOLOGIES LTD·Filed 2021·Granted Oct 31, 2023·2 cites·11 claims
- 0379US12077863B2PE-CVD apparatus and methodSPTS TECHNOLOGIES LTD·Filed 2023·Granted Sep 3, 2024·0 cites·13 claims
- 0478US10900114B2Method and apparatus for depositing a materialSPTS TECHNOLOGIES LTD·Filed 2016·Granted Jan 26, 2021·3 cites·18 claims
- 0574US10601388B2Method of depositionSPTS TECHNOLOGIES LTD·Filed 2016·Granted Mar 24, 2020·1 cites·17 claims
- 0672US11127568B2Plasma etching apparatusSPTS TECHNOLOGIES LTD·Filed 2019·Granted Sep 21, 2021·1 cites·16 claims
- 0771US12492465B2PVD apparatus and methodSPTS TECHNOLOGIES LTD·Filed 2024·Granted Dec 9, 2025·0 cites·22 claims
- 0869US10153135B2Plasma etching apparatusSPTS TECHNOLOGIES LTD·Filed 2016·Granted Dec 11, 2018·2 cites·22 claims
- 0968US9472610B2SubstrateSPTS TECHNOLOGIES LTD·Filed 2015·Granted Oct 18, 2016·2 cites·26 claims
- 1067US7282158B2Method of processing a workpieceAVIZA TECHNOLOGY LTD·Filed 2005·Granted Oct 16, 2007·4 cites·12 claims
- 1167US6660140B2Sputtering apparatusTRIKON HOLDINGS LTD·Filed 2000·Granted Dec 9, 2003·8 cites·2 claims
- 1265US10622193B2Plasma etching apparatusSPTS TECHNOLOGIES LTD·Filed 2015·Granted Apr 14, 2020·1 cites·25 claims
- 1362US9728432B2Method of degassingSPTS TECHNOLOGIES LTD·Filed 2015·Granted Aug 8, 2017·1 cites·13 claims
- 1460US9165762B2Method of depositing silicone dioxide filmsSPTS TECHNOLOGIES LTD·Filed 2013·Granted Oct 20, 2015·1 cites·7 claims
- 1559US7378001B2Magnetron sputteringAVIZA EUROP LTD·Filed 2001·Granted May 27, 2008·7 cites·27 claims
- 1657US11875980B2Method and apparatus for depositing a materialSPTS TECHNOLOGIES LTD·Filed 2020·Granted Jan 16, 2024·0 cites·9 claims
- 1757US9719166B2Method of supporting a workpiece during physical vapour depositionBURGESS STEPHEN R·Filed 2012·Granted Aug 1, 2017·1 cites·4 claims
- 1857US9048066B2Method of etchingSPTS TECHNOLOGIES LTD·Filed 2013·Granted Jun 2, 2015·1 cites·12 claims
- 1954US9803272B2Deposition of silicon dioxideSPTS TECHNOLOGIES LTD·Filed 2014·Granted Oct 31, 2017·0 cites·12 claims
- 2051US6933099B2Method of forming a patterned metal layerTRIKON HOLDINGS LTD·Filed 2002·Granted Aug 23, 2005·3 cites·23 claims
- 2150US6860975B2Barrier layer and method of depositing a barrier layerTRIKON TECHNOLOGIES LTD·Filed 2003·Granted Mar 1, 2005·4 cites·12 claims
- 2249US2023136705A1PVD Method and ApparatusSPTS TECHNOLOGIES LTD·Filed 2022·Application pending·0 cites
- 2346US9670574B2Methods of depositing aluminium layersHYNDMAN RHONDA·Filed 2012·Granted Jun 6, 2017·0 cites·18 claims
- 2444US10096468B2Method of improving adhesionSPTS TECHNOLOGIES LTD·Filed 2016·Granted Oct 9, 2018·0 cites·17 claims
- 2542US8728953B2Method and apparatus for processing a semiconductor workpieceSPTS TECHNOLOGIES LTD·Filed 2013·Granted May 20, 2014·0 cites·19 claims
- 2641US2005269200A1Film depositionBURGESS STEPHEN R·Filed 2005·Application pending·0 cites
- 2741US2011318502A1Methods of depositing sio2 filmsGILES KATHRINE·Filed 2010·Application pending·0 cites
- 2840US9783886B2PE-CVD apparatus and methodSPTS TECHNOLOGIES LTD·Filed 2016·Granted Oct 10, 2017·0 cites·13 claims
- 2940US7732307B2Method of forming amorphous TiN by thermal chemical vapor deposition (CVD)AVIZA TECHNOLOGY LTD·Filed 2005·Granted Jun 8, 2010·0 cites·17 claims
- 3038US2004214417A1Methods of forming tungsten or tungsten containing filmsFiled 2004·Application pending·0 cites
- 3138US2015225841A1Method of processing a substrateSPTS TECHNOLOGIES LTD·Filed 2015·Application pending·0 cites
- 3231US2004050690A1Magnetron sputtering apparatusFiled 2001·Application pending·0 cites
- 3329US8337675B2Method of plasma vapour depositionCARRUTHERS MARK IAN·Filed 2010·Granted Dec 25, 2012·0 cites·9 claims
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