Inventor · disambiguated record
Brian S. Freer
Also filed as: FREER BRIAN · FREER BRIAN S
11 granted patents·165 citations·filing 1997–2009
89Inventor score
Top patents by PatentIndex Score
11 records- 0187US6221169B1System and method for cleaning contaminated surfaces in an ion implanterAXCELIS TECH INC·Filed 1999·Granted Apr 24, 2001·64 cites·19 claims
- 0282US6828572B2Ion beam incident angle detector for ion implant systemsAXCELIS TECH INC·Filed 2003·Granted Dec 7, 2004·31 cites·42 claims
- 0380US7435977B2Ion beam angle measurement systems and methods for ion implantation systemsAXCELIS TECH INC·Filed 2005·Granted Oct 14, 2008·7 cites·23 claims
- 0473US8168941B2Ion beam angle calibration and emittance measurement system for ribbon beamsFARLEY MARVIN·Filed 2009·Granted May 1, 2012·5 cites·16 claims
- 0565US7598495B2Methods and systems for trapping ion beam particles and focusing an ion beamAXCELIS TECH INC·Filed 2007·Granted Oct 6, 2009·2 cites·33 claims
- 0656US9103031B2Method and system for growing a thin film using a gas cluster ion beamHAUTALA JOHN J·Filed 2008·Granted Aug 11, 2015·0 cites·20 claims
- 0754US5903009ABiased and serrated extension tube for ion implanter electron showerEATON CORP·Filed 1997·Granted May 11, 1999·19 cites·17 claims
- 0851US7557363B2Closed loop dose control for ion implantationAXCELIS TECH INC·Filed 2006·Granted Jul 7, 2009·0 cites·27 claims
- 0951US6215125B1Method to operate GEF4 gas in hot cathode discharge ion sourcesIBM·Filed 1998·Granted Apr 10, 2001·20 cites·25 claims
- 1051US5909031AIon implanter electron shower having enhanced secondary electron emissionEATON CORP·Filed 1997·Granted Jun 1, 1999·17 cites·11 claims
- 1143US7476876B2Ion beam angle measurement systems and methods employing varied angle slot arrays for ion implantation systemsAXCELIS TECH INC·Filed 2005·Granted Jan 13, 2009·0 cites·25 claims
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