Inventor · disambiguated record
Manabu Tsujimura
Also filed as: TSUJIMURA MANABU
57 granted patents·22 pending applications·1,541 citations·filing 1988–2024
99Inventor score
Top patents by PatentIndex Score
79 records- 0197US6632335B2Plating apparatusEBARA CORP·Filed 2000·Granted Oct 14, 2003·114 cites·77 claims
- 0295US7040968B2Polishing apparatusEBARA CORP·Filed 2005·Granted May 9, 2006·28 cites·12 claims
- 0393US7101255B2Polishing apparatusEBARA CORP·Filed 2005·Granted Sep 5, 2006·15 cites·12 claims
- 0493US6435949B1Workpiece polishing apparatus comprising a fluid pressure bag provided between a pressing surface and the workpiece and method of use thereofEBARA CORP·Filed 2000·Granted Aug 20, 2002·71 cites·8 claims
- 0593US5868866AMethod of and apparatus for cleaning workpieceEBARA CORP·Filed 1996·Granted Feb 9, 1999·155 cites·18 claims
- 0692US7150673B2Method for estimating polishing profile or polishing amount, polishing method and polishing apparatusEBARA CORP·Filed 2005·Granted Dec 19, 2006·15 cites·27 claims
- 0792US5885138AMethod and apparatus for dry-in, dry-out polishing and washing of a semiconductor deviceEBARA CORP·Filed 1996·Granted Mar 23, 1999·75 cites·124 claims
- 0892US5679059APolishing aparatus and methodEBARA CORP·Filed 1995·Granted Oct 21, 1997·110 cites·83 claims
- 0990US7234999B2Method for estimating polishing profile or polishing amount, polishing method and polishing apparatusEBARA CORP·Filed 2006·Granted Jun 26, 2007·12 cites·16 claims
- 1090US6939208B2Polishing apparatusEBARA CORP·Filed 2001·Granted Sep 6, 2005·42 cites·18 claims
- 1190US6294059B1Substrate plating apparatusEBARA CORP·Filed 1998·Granted Sep 25, 2001·83 cites·72 claims
- 1289US5476414APolishing apparatusEBARA CORP·Filed 1993·Granted Dec 19, 1995·122 cites·21 claims
- 1387US7895990B2Fuel injection system with injection characteristic learning functionDENSO CORP·Filed 2008·Granted Mar 1, 2011·17 cites·15 claims
- 1485US7891337B2Fuel injection system with injection characteristic learning functionDENSO CORP·Filed 2008·Granted Feb 22, 2011·15 cites·7 claims
- 1585US6439971B2Method and apparatus for dry-in, dry-out polishing and washing of a semiconductor deviceTOSHIBA KK·Filed 2001·Granted Aug 27, 2002·20 cites·52 claims
- 1684US4926648ATurbomolecular pump and method of operating the sameTOSHIBA CORP·Filed 1989·Granted May 22, 1990·40 cites·11 claims
- 1783US6413146B1Polishing apparatusEBARA CORP·Filed 2001·Granted Jul 2, 2002·17 cites·24 claims
- 1882US5704827APolishing apparatus including cloth cartridge connected to turntableEBARA CORP·Filed 1995·Granted Jan 6, 1998·67 cites·20 claims
- 1981US8257143B2Method and apparatus for polishing objectKATSUOKA SEIJI·Filed 2009·Granted Sep 4, 2012·8 cites·8 claims
- 2081US6443808B2Method and apparatus for dry-in, dry-out polishing and washing of a semiconductor deviceTOSHIBA KK·Filed 2001·Granted Sep 3, 2002·14 cites·64 claims
- 2181US6425806B2Method and apparatus for dry-in, dry-out polishing and washing of a semiconductor deviceTOSHIBA KK·Filed 2001·Granted Jul 30, 2002·14 cites·112 claims
- 2281US5062271AEvacuation apparatus and evacuation methodTOSHIBA KK·Filed 1990·Granted Nov 5, 1991·45 cites·8 claims
- 2381US2025118604A1Substrate polishing apparatus and substrate polishing methodEBARA CORP·Filed 2024·Application pending·0 cites
- 2480US6918814B2Polishing apparatusEBARA CORP·Filed 2002·Granted Jul 19, 2005·15 cites·9 claims
- 2580US6706422B2Electroless Ni—B plating liquid, electronic device and method for manufacturing the sameEBARA CORP·Filed 2001·Granted Mar 16, 2004·16 cites·7 claims
- 2680US6332826B1Polishing apparatusEBARA CORP·Filed 1998·Granted Dec 25, 2001·34 cites·98 claims
- 2779US6547638B2Method and apparatus for dry-in, dry-out polishing and washing of a semiconductor deviceEBARA CORP·Filed 2001·Granted Apr 15, 2003·12 cites·41 claims
- 2878US6997782B2Polishing apparatus and a method of polishing and cleaning and drying a waferTOSHIBA KK·Filed 2002·Granted Feb 14, 2006·16 cites·20 claims
- 2977US7650226B2Fuel injection system with learning control to compensate for actual-to-target injection quantityDENSO CORP·Filed 2008·Granted Jan 19, 2010·9 cites·16 claims
- 3077US7207864B2Polishing apparatusEBARA CORP·Filed 2006·Granted Apr 24, 2007·4 cites·12 claims
- 3177US2024087963A1Substrate polishing apparatus and substrate polishing methodEBARA CORP·Filed 2023·Application pending·0 cites
- 3276US5746581AMethod and apparatus for evacuating vacuum systemEBARA CORP·Filed 1995·Granted May 5, 1998·41 cites·18 claims
- 3375US7361076B2Method for estimating polishing profile or polishing amount, polishing method and polishing apparatusEBARA CORP·Filed 2007·Granted Apr 22, 2008·4 cites·14 claims
- 3471US7599784B2Fuel injection system learning average of injection quantities for correcting injection characteristic of fuel injectorDENSO CORP·Filed 2008·Granted Oct 6, 2009·7 cites·13 claims
- 3570US7198552B2Polishing apparatusTOSHIBA KK·Filed 2005·Granted Apr 3, 2007·2 cites·18 claims
- 3670US6626736B2Polishing apparatusEBARA CORP·Filed 2001·Granted Sep 30, 2003·11 cites·16 claims
- 3769US5705230AMethod for filling small holes or covering small recesses in the surface of substratesEBARA CORP·Filed 1994·Granted Jan 6, 1998·43 cites·3 claims
- 3868US7387717B2Method of performing electrolytic treatment on a conductive layer of a substrateEBARA CORP·Filed 2003·Granted Jun 17, 2008·3 cites·13 claims
- 3967US6500051B1Polishing apparatus and methodEBARA CORP·Filed 1997·Granted Dec 31, 2002·25 cites·57 claims
- 4067US5632868AMethod and apparatus for generating ozone and methods of its useEBARA CORP·Filed 1995·Granted May 27, 1997·24 cites·1 claims
- 4166US6406364B1Polishing solution feederEBARA CORP·Filed 1998·Granted Jun 18, 2002·25 cites·34 claims
- 4263US7588671B2Microfluidic treatment method and deviceEBARA CORP·Filed 2004·Granted Sep 15, 2009·12 cites·11 claims
- 4363US6783427B2Polishing system with air exhaust systemEBARA CORP·Filed 2002·Granted Aug 31, 2004·9 cites·20 claims
- 4461US6273802B1Method and apparatus for dry-in, dry-out polishing and washing of a semiconductor deviceTOSHIBA KK·Filed 1999·Granted Aug 14, 2001·14 cites·35 claims
- 4560US8583336B2Power transmission control apparatus for vehicleTSUJIMURA MANABU·Filed 2011·Granted Nov 12, 2013·2 cites·11 claims
- 4658US6936302B2Electroless Ni-B plating liquid, electronic device and method for manufacturing the sameTOSHIBA KK·Filed 2004·Granted Aug 30, 2005·2 cites·6 claims
- 4758US5656542AMethod for manufacturing wiring in grooveTOSHIBA KK·Filed 1995·Granted Aug 12, 1997·25 cites·10 claims
- 4857US2008251385A1Plating apparatusKUNISAWA JUNJI·Filed 2008·Application pending·0 cites
- 4957US2008296165A1Plating apparatusKUNISAWA JUNJI·Filed 2008·Application pending·0 cites
- 5056US8784262B2Vehicular power transmission control apparatusTSUJIMURA MANABU·Filed 2011·Granted Jul 22, 2014·1 cites·9 claims
Showing the top 50 of 79 patent records by PatentIndex Score.
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →