Inventor · disambiguated record
Paul Rich
Also filed as: RICH PAUL · RICH PAUL J
14 granted patents·7 pending applications·110 citations·filing 1994–2020
91Inventor score
Top patents by PatentIndex Score
21 records- 0178US10900114B2Method and apparatus for depositing a materialSPTS TECHNOLOGIES LTD·Filed 2016·Granted Jan 26, 2021·3 cites·18 claims
- 0276US6402907B1Method of forming a barrier layerTRIKON HOLDINGS LTD·Filed 2000·Granted Jun 11, 2002·25 cites·10 claims
- 0369US10153135B2Plasma etching apparatusSPTS TECHNOLOGIES LTD·Filed 2016·Granted Dec 11, 2018·2 cites·22 claims
- 0467US6660140B2Sputtering apparatusTRIKON HOLDINGS LTD·Filed 2000·Granted Dec 9, 2003·8 cites·2 claims
- 0567US6283288B1Fishing pole and tackle caseFiled 1999·Granted Sep 4, 2001·26 cites·11 claims
- 0658US5606651AProcess for merging CAD vector files and automatically removing duplicate and obsolete patternsIBM·Filed 1996·Granted Feb 25, 1997·26 cites·18 claims
- 0757US11875980B2Method and apparatus for depositing a materialSPTS TECHNOLOGIES LTD·Filed 2020·Granted Jan 16, 2024·0 cites·9 claims
- 0847US2005236267A1Methods and apparatus for controlling rotating magnetic fieldsRICH PAUL·Filed 2005·Application pending·0 cites
- 0944US5572637AProcess for merging CAD vector files and automatically removing duplicate and obsolete patternsIBM·Filed 1994·Granted Nov 5, 1996·12 cites·11 claims
- 1042US6949170B2Deposition methods and apparatusTRIKON HOLDINGS LTD·Filed 2003·Granted Sep 27, 2005·0 cites·19 claims
- 1141US6831010B2Method and depositing a layerTRIKON TECHNOLOGIES LTD·Filed 2000·Granted Dec 14, 2004·2 cites·11 claims
- 1241US2005269200A1Film depositionBURGESS STEPHEN R·Filed 2005·Application pending·0 cites
- 1340US2004154748A1Electrostatic clamping of thin wafers in plasma processing vacuum chamberFiled 2004·Application pending·0 cites
- 1439US2006182618A1Methods and apparatus for processing the backsides of wafersRICH PAUL·Filed 2005·Application pending·0 cites
- 1538US2004214417A1Methods of forming tungsten or tungsten containing filmsFiled 2004·Application pending·0 cites
- 1635US6905962B2Method of depositing a layerTRIKON TECHNOLOGIES LTD·Filed 2003·Granted Jun 14, 2005·0 cites·10 claims
- 1735US2004180538A1Method for producing a copper connectionFiled 2002·Application pending·0 cites
- 1835US2004188241A1Method of depositing aluminium nitrideFiled 2002·Application pending·0 cites
- 1934US7227292B2Methods of depositing piezoelectric filmsAVIZA TECHNOLOGIES INC·Filed 2004·Granted Jun 5, 2007·2 cites·15 claims
- 2034US6514389B1Method of processing a workpieceTRIKON TECHNOLOGIES LTD·Filed 1996·Granted Feb 4, 2003·4 cites·14 claims
- 2129US8337675B2Method of plasma vapour depositionCARRUTHERS MARK IAN·Filed 2010·Granted Dec 25, 2012·0 cites·9 claims
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