Inventor · disambiguated record
Mehrdad M. Moslehi
Also filed as: MOSLEHI MEHRDAD · MOSLEHI MEHRDAD M · MOSLEHI MEHRDAD MAHMUD
238 granted patents·90 pending applications·16,669 citations·filing 1986–2025
99Inventor score
Top patents by PatentIndex Score
328 records- 0199US5453124AProgrammable multizone gas injector for single-wafer semiconductor processing equipmentTEXAS INSTRUMENTS INC·Filed 1994·Granted Sep 26, 1995·908 cites·4 claims
- 0299US5273609AMethod and apparatus for time-division plasma chopping in a multi-channel plasma processing equipmentTEXAS INSTRUMENTS INC·Filed 1990·Granted Dec 28, 1993·547 cites·25 claims
- 0399US5252178AMulti-zone plasma processing method and apparatusTEXAS INSTRUMENTS INC·Filed 1992·Granted Oct 12, 1993·516 cites·26 claims
- 0499US5082517APlasma density controller for semiconductor device processing equipmentTEXAS INSTRUMENTS INC·Filed 1990·Granted Jan 21, 1992·513 cites·50 claims
- 0599US4956538AMethod and apparatus for real-time wafer temperature measurement using infrared pyrometry in advanced lamp-heated rapid thermal processorsTEXAS INSTRUMENTS INC·Filed 1988·Granted Sep 11, 1990·526 cites·38 claims
- 0699US4913929AThermal/microwave remote plasma multiprocessing reactor and method of useUNIV LELAND STANFORD JUNIOR·Filed 1987·Granted Apr 3, 1990·399 cites·14 claims
- 0798US6692575B1Apparatus for supporting a substrate in a reaction chamberCVC PRODUCTS INC·Filed 2000·Granted Feb 17, 2004·565 cites·22 claims
- 0898US6136165AApparatus for inductively-coupled-plasma-enhanced ionized physical-vapor depositionCVC PRODUCTS INC·Filed 1997·Granted Oct 24, 2000·169 cites·32 claims
- 0998US6016000AUltra high-speed chip semiconductor integrated circuit interconnect structure and fabrication method using free-space dielectricsCVC INC·Filed 1998·Granted Jan 18, 2000·290 cites·35 claims
- 1098US5403434ALow-temperature in-situ dry cleaning process for semiconductor waferTEXAS INSTRUMENTS INC·Filed 1994·Granted Apr 4, 1995·452 cites·20 claims
- 1198US5268989AMulti zone illuminator with embeded process control sensors and light interference elimination circuitTEXAS INSTRUMENTS INC·Filed 1992·Granted Dec 7, 1993·399 cites·20 claims
- 1298US5089441ALow-temperature in-situ dry cleaning process for semiconductor wafersTEXAS INSTRUMENTS INC·Filed 1990·Granted Feb 18, 1992·408 cites·7 claims
- 1398US4996077ADistributed ECR remote plasma processing and apparatusTEXAS INSTRUMENTS INC·Filed 1988·Granted Feb 26, 1991·230 cites·65 claims
- 1498US4715937ALow-temperature direct nitridation of silicon in nitrogen plasma generated by microwave dischargeUNIV LELAND STANFORD JUNIOR·Filed 1986·Granted Dec 29, 1987·263 cites·7 claims
- 1597US9929054B2Systems and methods for laser splitting and device layer transferSOLEXEL INC·Filed 2015·Granted Mar 27, 2018·9 cites·15 claims
- 1697US8294026B2High-efficiency thin-film solar cellsWANG DAVID XUAN-QI·Filed 2009·Granted Oct 23, 2012·47 cites·13 claims
- 1797US6365502B1Microelectronic interconnect material with adhesion promotion layer and fabrication methodCVC PRODUCTS INC·Filed 2000·Granted Apr 2, 2002·153 cites·17 claims
- 1897US6203620B1Hermetically-sealed inductively-coupled plasma source structure and method of useCVC PRODUCTS INC·Filed 2000·Granted Mar 20, 2001·90 cites·22 claims
- 1997US6132805AShutter for thin-film processing equipmentCVC PRODUCTS INC·Filed 1998·Granted Oct 17, 2000·133 cites·57 claims
- 2097US5937142AMulti-zone illuminator for rapid thermal processingCVC PRODUCTS INC·Filed 1996·Granted Aug 10, 1999·471 cites·17 claims
- 2197US5719495AApparatus for semiconductor device fabrication diagnosis and prognosisTEXAS INSTRUMENTS INC·Filed 1996·Granted Feb 17, 1998·252 cites·5 claims
- 2297US5464499AMulti-electrode plasma processing apparatusTEXAS INSTRUMENTS INC·Filed 1993·Granted Nov 7, 1995·297 cites·11 claims
- 2397US5305417AApparatus and method for determining wafer temperature using pyrometryTEXAS INSTRUMENTS INC·Filed 1993·Granted Apr 19, 1994·510 cites·23 claims
- 2497US5079481APlasma-assisted processing magneton with magnetic field adjustmentTEXAS INSTRUMENTS INC·Filed 1990·Granted Jan 7, 1992·121 cites·27 claims
- 2596US6488822B1Segmented-target ionized physical-vapor deposition apparatus and method of operationVEECO CVC INC·Filed 2000·Granted Dec 3, 2002·84 cites·40 claims
- 2696US6444263B1Method of chemical-vapor deposition of a materialCVC PRODUCTS INC·Filed 2000·Granted Sep 3, 2002·108 cites·20 claims
- 2796US6209480B1Hermetically-sealed inductively-coupled plasma source structure and method of useFiled 1996·Granted Apr 3, 2001·104 cites·47 claims
- 2896US5635409AReal-time multi-zone semiconductor wafer temperature and process uniformity control systemTEXAS INSTRUMENTS INC·Filed 1994·Granted Jun 3, 1997·202 cites·12 claims
- 2996US5397962ASource and method for generating high-density plasma with inductive power couplingTEXAS INSTRUMENTS INC·Filed 1992·Granted Mar 14, 1995·145 cites·18 claims
- 3095US9214353B2Systems and methods for laser splitting and device layer transferSOLEXEL INC·Filed 2013·Granted Dec 15, 2015·25 cites·8 claims
- 3195US8742249B2Solar module structures and assembly methods for three-dimensional thin-film solar cellsMOSLEHI MEHRDAD M·Filed 2011·Granted Jun 3, 2014·11 cites·10 claims
- 3295US8399331B2Laser processing for high-efficiency thin crystalline silicon solar cell fabricationMOSLEHI MEHRDAD M·Filed 2011·Granted Mar 19, 2013·20 cites·18 claims
- 3395US8129822B2Template for three-dimensional thin-film solar cell manufacturing and methods of useMOSLEHI MEHRDAD·Filed 2007·Granted Mar 6, 2012·25 cites·5 claims
- 3495US8035027B2Solar module structures and assembly methods for pyramidal three-dimensional thin-film solar cellsSOLEXEL INC·Filed 2007·Granted Oct 11, 2011·20 cites·8 claims
- 3595US7999174B2Solar module structures and assembly methods for three-dimensional thin-film solar cellsSOLEXEL INC·Filed 2007·Granted Aug 16, 2011·25 cites·5 claims
- 3695US6508197B1Apparatus for dispensing gas for fabricating substratesCVC PRODUCTS INC·Filed 2000·Granted Jan 21, 2003·70 cites·23 claims
- 3795US6294836B1Semiconductor chip interconnect barrier material and fabrication methodCVC PRODUCTS INC·Filed 1998·Granted Sep 25, 2001·131 cites·14 claims
- 3895US6190732B1Method and system for dispensing process gas for fabricating a device on a substrateCVC PRODUCTS INC·Filed 1998·Granted Feb 20, 2001·126 cites·24 claims
- 3995US6051113AApparatus and method for multi-target physical-vapor deposition of a multi-layer material structure using target indexingCVC PRODUCTS INC·Filed 1998·Granted Apr 18, 2000·141 cites·75 claims
- 4095US5976261AMulti-zone gas injection apparatus and method for microelectronics manufacturing equipmentCVC PRODUCTS INC·Filed 1996·Granted Nov 2, 1999·155 cites·42 claims
- 4195US5846883AMethod for multi-zone high-density inductively-coupled plasma generationCVC INC·Filed 1996·Granted Dec 8, 1998·168 cites·27 claims
- 4295US5168072AMethod of fabricating an high-performance insulated-gate field-effect transistorTEXAS INSTRUMENTS INC·Filed 1990·Granted Dec 1, 1992·207 cites·31 claims
- 4395US5156461AMulti-point pyrometry with real-time surface emissivity compensationTEXAS INSTRUMENTS INC·Filed 1991·Granted Oct 20, 1992·156 cites·19 claims
- 4494US10784815B2Solar photovoltaic module remote access module switch and real-time temperature monitoringSIGMAGEN INC·Filed 2017·Granted Sep 22, 2020·11 cites·14 claims
- 4594US8551866B2Three-dimensional thin-film semiconductor substrate with through-holes and methods of manufacturingMOSLEHI MEHRDAD M·Filed 2010·Granted Oct 8, 2013·13 cites·19 claims
- 4694US8288195B2Method for fabricating a three-dimensional thin-film semiconductor substrate from a templateWANG DAVID XUAN-QI·Filed 2010·Granted Oct 16, 2012·13 cites·20 claims
- 4794US8084684B2Three-dimensional thin-film solar cellsMOSLEHI MEHRDAD·Filed 2007·Granted Dec 27, 2011·13 cites·6 claims
- 4894US6471830B1Inductively-coupled-plasma ionized physical-vapor deposition apparatus, method and systemVEECO CVC INC·Filed 2000·Granted Oct 29, 2002·71 cites·65 claims
- 4994US6124198AUltra high-speed chip interconnect using free-space dielectricsCVC INC·Filed 1998·Granted Sep 26, 2000·161 cites·21 claims
- 5094US5496750AElevated source/drain junction metal oxide semiconductor field-effect transistor using blanket silicon depositionTEXAS INSTRUMENTS INC·Filed 1994·Granted Mar 5, 1996·117 cites·59 claims
Showing the top 50 of 328 patent records by PatentIndex Score.
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