Inventor · disambiguated record
Ahmad Kermani
Also filed as: KERMANI AHMAD
7 granted patents·1,079 citations·filing 1987–1996
91Inventor score
Files withCVC PRODUCTS INC2PEAK SYSTEMS INC2CROWLEY JOHN L1PROCESSING TECHNOLOGIES INC AG1RAPRO TECHNOLOGY1
Top patents by PatentIndex Score
7 records- 0197US5937142AMulti-zone illuminator for rapid thermal processingCVC PRODUCTS INC·Filed 1996·Granted Aug 10, 1999·471 cites·17 claims
- 0295US5976261AMulti-zone gas injection apparatus and method for microelectronics manufacturing equipmentCVC PRODUCTS INC·Filed 1996·Granted Nov 2, 1999·155 cites·42 claims
- 0391US5002630AMethod for high temperature thermal processing with reduced convective heat lossRAPRO TECHNOLOGY·Filed 1989·Granted Mar 26, 1991·88 cites·13 claims
- 0488US5324684AGas phase doping of semiconductor material in a cold-wall radiantly heated reactor under reduced pressurePROCESSING TECHNOLOGIES INC AG·Filed 1992·Granted Jun 28, 1994·118 cites·78 claims
- 0587US4755654ASemiconductor wafer heating chamberCROWLEY JOHN L·Filed 1987·Granted Jul 5, 1988·83 cites·21 claims
- 0682US4984902AApparatus and method for compensating for errors in temperature measurement of semiconductor wafers during rapid thermal processingPEAK SYSTEMS INC·Filed 1990·Granted Jan 15, 1991·98 cites·7 claims
- 0781US4969748AApparatus and method for compensating for errors in temperature measurement of semiconductor wafers during rapid thermal processingPEAK SYSTEMS INC·Filed 1989·Granted Nov 13, 1990·66 cites·7 claims
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