Inventor · disambiguated record
Kazuo Tokitomo
Also filed as: TOKITOMO KAZUO
5 granted patents·174 citations·filing 1980–1991
84Inventor score
Files withFUJITSU LTD5
Top patents by PatentIndex Score
5 records- 0188US4328262AMethod of manufacturing semiconductor devices having photoresist film as a permanent layerFUJITSU LTD·Filed 1980·Granted May 4, 1982·79 cites·12 claims
- 0277US4350563ADry etching of metal filmFUJITSU LTD·Filed 1980·Granted Sep 21, 1982·43 cites·12 claims
- 0370US5126220AReticle for photolithographic patterningFUJITSU LTD·Filed 1991·Granted Jun 30, 1992·26 cites·6 claims
- 0458US5147742APhotomask and fabrication of the sameFUJITSU LTD·Filed 1991·Granted Sep 15, 1992·16 cites·11 claims
- 0540US4328263AMethod of manufacturing semiconductor devices using lift-off techniqueFUJITSU LTD·Filed 1980·Granted May 4, 1982·10 cites·4 claims
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