Inventor · disambiguated record
Fumio Mizuno
Also filed as: MIZUNO FUMIO
49 granted patents·1,584 citations·filing 1975–2010
99Inventor score
Top patents by PatentIndex Score
49 records- 0199US6538249B1Image-formation apparatus using charged particle beams under various focus conditionsHITACHI LTD·Filed 2000·Granted Mar 25, 2003·118 cites·36 claims
- 0298US5412210AScanning electron microscope and method for production of semiconductor device by using the sameHITACHI LTD·Filed 1993·Granted May 2, 1995·148 cites·70 claims
- 0393US7109485B2Charged particle beam apparatusHITACHI LTD·Filed 2005·Granted Sep 19, 2006·19 cites·5 claims
- 0493US6114695AScanning electron microscope and method for dimension measuring by using the sameHITACHI LTD·Filed 1999·Granted Sep 5, 2000·62 cites·4 claims
- 0593US5466325AResist removing method, and curable pressure-sensitive adhesive, adhesive sheets and apparatus used for the methodNITTO DENKO CORP·Filed 1994·Granted Nov 14, 1995·83 cites·2 claims
- 0691US6047083AMethod of and apparatus for pattern inspectionHITACHI LTD·Filed 1998·Granted Apr 4, 2000·113 cites·3 claims
- 0791US5594245AScanning electron microscope and method for dimension measuring by using the sameHITACHI LTD·Filed 1995·Granted Jan 14, 1997·71 cites·20 claims
- 0890US7642514B2Charged particle beam apparatusHITACHI LTD·Filed 2007·Granted Jan 5, 2010·14 cites·8 claims
- 0990US6653633B2Charged particle beam apparatusHITACHI LTD·Filed 2003·Granted Nov 25, 2003·22 cites·7 claims
- 1090US6072178ASample analyzing apparatusHITACHI LTD·Filed 1998·Granted Jun 6, 2000·79 cites·24 claims
- 1189US8304724B2Microstructured pattern inspection methodSASAJIMA FUMIHIRO·Filed 2010·Granted Nov 6, 2012·5 cites·8 claims
- 1289US7435959B2Microstructured pattern inspection methodHITACHI LTD·Filed 2007·Granted Oct 14, 2008·7 cites·20 claims
- 1389US7329868B2Charged particle beam apparatusHITACHI LTD·Filed 2006·Granted Feb 12, 2008·7 cites·3 claims
- 1489US7217923B2Microstructured pattern inspection methodHITACHI LTD·Filed 2005·Granted May 15, 2007·7 cites·11 claims
- 1589US5750990AMethod for measuring critical dimension of pattern on sampleHITACHI LTD·Filed 1996·Granted May 12, 1998·87 cites·10 claims
- 1688US7791021B2Microstructured pattern inspection methodHITACHI LTD·Filed 2008·Granted Sep 7, 2010·6 cites·15 claims
- 1788US5969357AScanning electron microscope and method for dimension measuring by using the sameHITACHI LTD·Filed 1997·Granted Oct 19, 1999·43 cites·20 claims
- 1888US5777327APattern shape inspection apparatus for forming specimen image on display apparatusHITACHI LTD·Filed 1996·Granted Jul 7, 1998·64 cites·9 claims
- 1987US6542830B1Process control systemHITACHI LTD·Filed 1997·Granted Apr 1, 2003·93 cites·25 claims
- 2084US6936818B2Charged particle beam apparatusHITACHI LTD·Filed 2003·Granted Aug 30, 2005·12 cites·6 claims
- 2184US5436095AManufacturing method or an exposing method for a semiconductor device for a semiconductor integrated circuit device and a mask used thereforHITACHI LTD·Filed 1992·Granted Jul 25, 1995·65 cites·26 claims
- 2283US6757621B2Process management systemHITACHI LTD·Filed 2003·Granted Jun 29, 2004·35 cites·10 claims
- 2383US5866904AScanning electron microscope and method for dimension measuring by using the sameHITACHI LTD·Filed 1997·Granted Feb 2, 1999·42 cites·24 claims
- 2477US6765204B2Microstructured pattern inspection methodHITACHI LTD·Filed 2003·Granted Jul 20, 2004·7 cites·12 claims
- 2575US6573499B1Microstructured pattern inspection methodHITACHI LTD·Filed 2000·Granted Jun 3, 2003·12 cites·11 claims
- 2675US6067153APattern defect inspecting apparatusHITACHI LTD·Filed 1997·Granted May 23, 2000·57 cites·33 claims
- 2772US4735926AAlumina ceramic bodyNGK SPARK PLUG CO·Filed 1986·Granted Apr 5, 1988·22 cites·6 claims
- 2868US4585745ADielectric ceramic composition for high frequency purposesNGK SPARK PLUG CO·Filed 1984·Granted Apr 29, 1986·23 cites·1 claims
- 2967US5736300AManufacturing method or an exposing method for a semiconductor device or a semiconductor integrated circuit device and a mask used thereforHITACHI LTD·Filed 1996·Granted Apr 7, 1998·25 cites·25 claims
- 3065US4866016AAlumina-based ceramic compositionNGK SPARK PLUG CO·Filed 1987·Granted Sep 12, 1989·18 cites·11 claims
- 3164US5405810AAlignment method and apparatusHITACHI LTD·Filed 1992·Granted Apr 11, 1995·36 cites·31 claims
- 3262US4118794AMemory array with larger memory capacitors at row endsHITACHI LTD·Filed 1977·Granted Oct 3, 1978·9 cites·3 claims
- 3361US6157451ASample CD measurement systemHITACHI LTD·Filed 1999·Granted Dec 5, 2000·24 cites·34 claims
- 3461US4668646AAlumina ceramic compositionNGK SPARK PLUG CO·Filed 1986·Granted May 26, 1987·16 cites·4 claims
- 3560US4039252AField-effect liquid crystal-type display deviceENERGY SYSTEMS LTD·Filed 1975·Granted Aug 2, 1977·17 cites·1 claims
- 3659US6936819B2Microstructured pattern inspection methodHITACHI LTD·Filed 2004·Granted Aug 30, 2005·4 cites·31 claims
- 3758US5959011AResist removing method, and curable pressure-sensitive adhesive, adhesive sheets and apparatus used for the methodNITTO DENKO CORP·Filed 1996·Granted Sep 28, 1999·17 cites·8 claims
- 3857USRE37996EManufacturing method or an exposing method for a semiconductor device or a semiconductor integrated circuit device and a mask used thereforHITACHI LTD·Filed 2000·Granted Feb 18, 2003·4 cites·34 claims
- 3957US4614725AAlumina porcelain compositionNGK SPARK PLUG CO·Filed 1985·Granted Sep 30, 1986·13 cites·2 claims
- 4055US5578422AManufacturing method or an exposing method for a semiconductor device or a semiconductor integrated circuit device and a mask used thereforHITACHI LTD·Filed 1995·Granted Nov 26, 1996·15 cites·41 claims
- 4155US4720471AAlumina porcelain compositionsNGK SPARK PLUG CO·Filed 1986·Granted Jan 19, 1988·13 cites·1 claims
- 4251US4591574AAlumina porcelain compositionNGK SPARK PLUG CO·Filed 1985·Granted May 27, 1986·11 cites·1 claims
- 4347US5512361AIntegrally molded polyurethane foam productsINOUE MTP KK·Filed 1995·Granted Apr 30, 1996·18 cites·10 claims
- 4446US5155092ACeramic superconducting composition and process and apparatus for preparing thereofNGK SPARK PLUG CO·Filed 1989·Granted Oct 13, 1992·8 cites·19 claims
- 4539US7804111B2Semiconductor device and method for adjusting characteristics thereofTAMA TLO LTD·Filed 2006·Granted Sep 28, 2010·0 cites·18 claims
- 4639US4643985ADielectric porcelain materialNGK SPARK PLUG CO·Filed 1985·Granted Feb 17, 1987·6 cites·9 claims
- 4736US8217466B2High-speed semiconductor device and method for manufacturing the sameOTSUKA KANJI·Filed 2006·Granted Jul 10, 2012·0 cites·11 claims
- 4836US5272122ABaO-xTiO2 dielectric ceramic compositionNGK SPARK PLUG CO·Filed 1992·Granted Dec 21, 1993·5 cites·4 claims
- 4931US5198396AMicrowave dielectric ceramic compositionNGK SPARK PLUG CO·Filed 1992·Granted Mar 30, 1993·2 cites·9 claims
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