Inventor · disambiguated record

Kenneth J. Bhang

Also filed as: BHANG KENNETH J

1 granted patent·3 citations·filing 2012–2012

25Inventor score

Technology areasH10P

Files withBHANG KENNETH J1

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1 record

0169US8486194B2Apparatus for efficient removal of halogen residues from etched substratesBHANG KENNETH J·Filed 2012·Granted Jul 16, 2013·3 cites·13 claims

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