Inventor · disambiguated record

Tohru Iwabae

Also filed as: IWABAE TOHRU

2 granted patents·19 citations·filing 2008–2009

51Inventor score

Technology areasH10P

Files withTANAKA OSAMU1 TSUCHIYA TAKAFUMI1

Top patents by PatentIndex Score

2 records

0187US8079797B2Substrate processing system and substrate transfer methodTANAKA OSAMU·Filed 2008·Granted Dec 20, 2011·19 cites·16 claims
0236US8790469B2Treating apparatus, treating method and recording mediumTSUCHIYA TAKAFUMI·Filed 2009·Granted Jul 29, 2014·0 cites·9 claims

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