Inventor · disambiguated record

Wolfgang Mueller-Herget

Also filed as: MUELLER-HERGET WOLFGANG

1 granted patent·15 citations·filing 1991–1991

36Inventor score

Technology areasG03F

Files withELLIOTT DAVID J1

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1 record

0151US5206515ADeep ultraviolet photolithography and microfabricationELLIOTT DAVID J·Filed 1991·Granted Apr 27, 1993·15 cites·22 claims

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