Inventor · disambiguated record

Tanya Serzhanyuk

Also filed as: SERZHANYUK TANYA

1 granted patent·0 citations·filing 2019–2019

8Inventor score

Technology areasG03F

Files withZEISS CARL SMS LTD1

Top patents by PatentIndex Score

1 record

0145US11366383B2Method and apparatus for determining positions of a plurality of pixels to be introduced in a substrate of a photolithographic maskZEISS CARL SMS LTD·Filed 2019·Granted Jun 21, 2022·0 cites·22 claims

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