Inventor · disambiguated record

Tetsuo Sugiyama

Also filed as: SUGIYAMA TETSUO

1 granted patent·0 citations·filing 2009–2009

9Inventor score

Technology areasH10P

Files withFURUNO MAKOTO1

Top patents by PatentIndex Score

1 record

0140US8247315B2Plasma processing apparatus and method for manufacturing semiconductor deviceFURUNO MAKOTO·Filed 2009·Granted Aug 21, 2012·0 cites·3 claims

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