Inventor · disambiguated record
Gary W. Behm
Also filed as: BEHM GARY · BEHM GARY W · BEHM GARY WALTER
17 granted patents·4 pending applications·134 citations·filing 2005–2021
93Inventor score
Top patents by PatentIndex Score
21 records- 0191US8842021B2Methods and systems for early warning detection of emergency vehiclesBEHM GARY W·Filed 2011·Granted Sep 23, 2014·39 cites·19 claims
- 0291US7778112B2Apparatus and method for sensing of three-dimensional environmental informationIBM·Filed 2008·Granted Aug 17, 2010·32 cites·12 claims
- 0384US7113845B1Integration of factory level and tool level advanced process control systemsIBM·Filed 2005·Granted Sep 26, 2006·16 cites·21 claims
- 0483US8077020B2Method and apparatus for tactile haptic device to guide user in real-time obstacle avoidanceBEHM GARY W·Filed 2008·Granted Dec 13, 2011·17 cites·18 claims
- 0578US7291285B2Method and system for line-dimension control of an etch processIBM·Filed 2005·Granted Nov 6, 2007·4 cites·26 claims
- 0673US8229691B2Method for using real-time APC information for an enhanced lot sampling engineBEHM GARY W·Filed 2008·Granted Jul 24, 2012·6 cites·16 claims
- 0773US7489980B2Factory level and tool level advanced process control systems integration implementationIBM·Filed 2006·Granted Feb 10, 2009·5 cites·3 claims
- 0870US7899566B2Factory level and tool level advanced process control systems integration implementationIBM·Filed 2009·Granted Mar 1, 2011·2 cites·18 claims
- 0970US7398172B2Method and system of providing a dynamic sampling plan for integrated metrologyIBM·Filed 2006·Granted Jul 8, 2008·5 cites·8 claims
- 1063US8565910B2Manufacturing execution system (MES) including a wafer sampling engine (WSE) for a semiconductor manufacturing processBEHM GARY W·Filed 2011·Granted Oct 22, 2013·1 cites·18 claims
- 1161US7509186B2Method and system for reducing the variation in film thickness on a plurality of semiconductor wafers having multiple deposition paths in a semiconductor manufacturing processIBM·Filed 2006·Granted Mar 24, 2009·2 cites·20 claims
- 1260US8130262B2Apparatus and method for enhancing field of vision of the visually impairedBEHM GARY W·Filed 2009·Granted Mar 6, 2012·3 cites·18 claims
- 1358US7700378B2Method and system for line-dimension control of an etch processIBM·Filed 2007·Granted Apr 20, 2010·0 cites·10 claims
- 1457US7895008B2Method of performing measurement sampling of lots in a manufacturing processIBM·Filed 2008·Granted Feb 22, 2011·1 cites·22 claims
- 1556US2008092897A1See-through mask to facilitate communication in environments requiring the wearing of a maskIBM·Filed 2006·Application pending·0 cites
- 1656US2009028003A1Apparatus and method for sensing of three-dimensional environmental informationIBM·Filed 2007·Application pending·0 cites
- 1755US7577537B2Providing a dynamic sampling plan for integrated metrologyIBM·Filed 2008·Granted Aug 18, 2009·1 cites·12 claims
- 1855US2010204839A1Method and apparatus for the monitoring of water usage with pattern recognitionIBM·Filed 2009·Application pending·0 cites
- 1951US2012215490A1Method for using real-time apc information for an enhanced lot sampling engineBEHM GARY W·Filed 2012·Application pending·0 cites
- 2038US12267457B2Method and system to enhance communication between multiple partiesBEHM GARY·Filed 2021·Granted Apr 1, 2025·0 cites·14 claims
- 2135US11012559B2Method and system to enhance communication between multiple partiesBEHM GARY·Filed 2020·Granted May 18, 2021·0 cites·16 claims
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