Inventor · disambiguated record
Michiel David Nijkerk
Also filed as: NIJKERK MICHIEL D · NIJKERK MICHIEL DAVID · VAN MIERLO H A · VAN MIERLO HUBERT ADRIAAN
9 granted patents·25 citations·filing 2003–2012
83Inventor score
Top patents by PatentIndex Score
9 records- 0185US7732762B2Method of inspecting a specimen surface, apparatus and use of fluorescent materialTNO·Filed 2005·Granted Jun 8, 2010·11 cites·47 claims
- 0272US8559108B2Grating for EUV-radiation, method for manufacturing the grating and wavefront measurement systemKRUIZINGA BORGERT·Filed 2008·Granted Oct 15, 2013·5 cites·20 claims
- 0370US8164077B2Optical element for radiation in the EUV and/or soft X-ray region and an optical system with at least one optical elementWEDOWSKI MARCO·Filed 2009·Granted Apr 24, 2012·3 cites·33 claims
- 0467US7646004B2Optical element for radiation in the EUV and/or soft X-ray region and an optical system with at least one optical elementZEISS CARL SMT AG·Filed 2006·Granted Jan 12, 2010·2 cites·50 claims
- 0566US7491951B2Lithographic apparatus, system and device manufacturing methodASML NETHERLANDS BV·Filed 2005·Granted Feb 17, 2009·2 cites·47 claims
- 0646US7379153B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2003·Granted May 27, 2008·2 cites·19 claims
- 0745US9383490B2Depolarizer, telescope and remote sensing device and methodTNO·Filed 2012·Granted Jul 5, 2016·0 cites·16 claims
- 0845US7390614B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2005·Granted Jun 24, 2008·0 cites·14 claims
- 0941US9304300B2Anamorphotic telescopeVISSER HUIBERT·Filed 2011·Granted Apr 5, 2016·0 cites·15 claims
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