Inventor · disambiguated record

Betty Zhang

Also filed as: ZHANG BETTY

1 granted patent·3 citations·filing 2002–2002

21Inventor score

Technology areasG01J

Files withAXCELIS TECH INC1

Top patents by PatentIndex Score

1 record

0142US6987269B2Apparatus and process for measuring light intensitiesAXCELIS TECH INC·Filed 2002·Granted Jan 17, 2006·3 cites·7 claims

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