Inventor · disambiguated record
Bakul Patel
Also filed as: PATEL BAKUL · PATEL BAKUL P
5 granted patents·2 pending applications·244 citations·filing 1999–2006
85Inventor score
Files withEKC TECHNOLOGY INC5
Top patents by PatentIndex Score
7 records- 0190US6235693B1Lactam compositions for cleaning organic and plasma etched residues for semiconductor devicesEKC TECHNOLOGY INC·Filed 1999·Granted May 22, 2001·111 cites·21 claims
- 0289US7273060B2Methods for chemically treating a substrate using foam technologyEKC TECHNOLOGY INC·Filed 2006·Granted Sep 25, 2007·16 cites·30 claims
- 0388US6777380B2Compositions for cleaning organic and plasma etched residues for semiconductor devicesEKC TECHNOLOGY INC·Filed 2001·Granted Aug 17, 2004·59 cites·17 claims
- 0479US7144848B2Cleaning compositions containing hydroxylamine derivatives and processes using same for residue removalEKC TECHNOLOGY INC·Filed 2003·Granted Dec 5, 2006·34 cites·20 claims
- 0577US7456140B2Compositions for cleaning organic and plasma etched residues for semiconductor devicesEKC TECHNOLOGY INC·Filed 2004·Granted Nov 25, 2008·24 cites·7 claims
- 0642US2003171239A1Methods and compositions for chemically treating a substrate using foam technologyFiled 2002·Application pending·0 cites
- 0736US2004140288A1Wet etch of titanium-tungsten filmFiled 2003·Application pending·0 cites
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