Inventor · disambiguated record

Stefan Muthmann

Also filed as: MUTHMANN STEFAN

1 granted patent·0 citations·filing 2011–2011

12Inventor score

Technology areasH01J

Files withMUTHMANN STEFAN1

Top patents by PatentIndex Score

1 record

0130US9478384B2Electrode for producing a plasma, plasma chamber having said electrode, and method for analyzing or processing a layer or the plasma in situMUTHMANN STEFAN·Filed 2011·Granted Oct 25, 2016·0 cites·16 claims

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