Inventor · disambiguated record

Kiyohito Iljima

Also filed as: ILJIMA KIYOHITO

1 granted patent·11 citations·filing 2002–2002

35Inventor score

Technology areasH10P

Files withTOKYO ELECTRON LTD1

Top patents by PatentIndex Score

1 record

0165US6970770B2Cluster tool and method for controlling transportTOKYO ELECTRON LTD·Filed 2002·Granted Nov 29, 2005·11 cites·10 claims

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