Inventor · disambiguated record
Annette Muehlpfordt
Also filed as: MUEHLPFORDT ANNETTE
1 granted patent·1 pending application·0 citations·filing 2003–2008
11Inventor score
Technology areasG03F
Files withZEISS CARL SMT AG2
Top patents by PatentIndex Score
2 records- 0138US2008218716A1Method for setting an optical imaging property in a microlithographic projection exposure apparatus, and projection exposure apparatus of this typeZEISS CARL SMT AG·Filed 2008·Application pending·0 cites
- 0231US6796664B2Method and device for decontaminating optical surfacesZEISS CARL SMT AG·Filed 2003·Granted Sep 28, 2004·0 cites·6 claims
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