Inventor · disambiguated record
Hirokuni Hiyama
Also filed as: HIYAMA HIROKUNI
55 granted patents·11 pending applications·2,106 citations·filing 1983–2014
99Inventor score
Top patents by PatentIndex Score
66 records- 0199US6861642B2Neutral particle beam processing apparatusEBARA CORP·Filed 2002·Granted Mar 1, 2005·421 cites·4 claims
- 0299US6849857B2Beam processing apparatusEBARA CORP·Filed 2002·Granted Feb 1, 2005·352 cites·10 claims
- 0398US5838447APolishing apparatus including thickness or flatness detectorEBARA CORP·Filed 1996·Granted Nov 17, 1998·336 cites·39 claims
- 0492US7150673B2Method for estimating polishing profile or polishing amount, polishing method and polishing apparatusEBARA CORP·Filed 2005·Granted Dec 19, 2006·15 cites·27 claims
- 0590US7234999B2Method for estimating polishing profile or polishing amount, polishing method and polishing apparatusEBARA CORP·Filed 2006·Granted Jun 26, 2007·12 cites·16 claims
- 0688US6595831B1Method for polishing workpieces using fixed abrasivesEBARA CORP·Filed 2000·Granted Jul 22, 2003·43 cites·24 claims
- 0787US8965555B2Dressing method, method of determining dressing conditions, program for determining dressing conditions, and polishing apparatusEBARA CORP·Filed 2014·Granted Feb 24, 2015·5 cites·4 claims
- 0886US6454644B1Polisher and method for manufacturing same and polishing toolEBARA CORP·Filed 2000·Granted Sep 24, 2002·36 cites·17 claims
- 0985US6942548B2Polishing method using an abrading plateEBARA CORP·Filed 2001·Granted Sep 13, 2005·27 cites·20 claims
- 1085US5882244APolishing apparatusEBARA CORP·Filed 1997·Granted Mar 16, 1999·65 cites·44 claims
- 1184US6220945B1Polishing apparatusEBARA CORP·Filed 1999·Granted Apr 24, 2001·51 cites·24 claims
- 1283US8655478B2Dressing method, method of determining dressing conditions, program for determining dressing conditions, and polishing apparatusFUKUDA AKIRA·Filed 2009·Granted Feb 18, 2014·8 cites·12 claims
- 1382US4885491AUnstable vibration prevention apparatus for magnetic bearing systemNAT AEROSPACE LAB·Filed 1988·Granted Dec 5, 1989·37 cites·9 claims
- 1481US6672945B1Polishing apparatus and dressing methodEBARA CORP·Filed 2000·Granted Jan 6, 2004·25 cites·18 claims
- 1580US6752692B2Cleaning method and polishing apparatus employing such cleaning methodEBARA CORP·Filed 2001·Granted Jun 22, 2004·18 cites·8 claims
- 1680US6458012B1Polishing apparatusEBARA CORP·Filed 2000·Granted Oct 1, 2002·18 cites·21 claims
- 1779US7078862B2Beam source and beam processing apparatusUNIV TOHOKU·Filed 2004·Granted Jul 18, 2006·13 cites·26 claims
- 1879US6861643B2Neutral particle beam processing apparatusEBARA CORP·Filed 2002·Granted Mar 1, 2005·14 cites·17 claims
- 1979US6609950B2Method for polishing a substrateEBARA CORP·Filed 2001·Granted Aug 26, 2003·20 cites·10 claims
- 2078US6402588B1Polishing apparatusEBARA CORP·Filed 1999·Granted Jun 11, 2002·42 cites·42 claims
- 2178US6390901B1Polishing apparatusEBARA CORP·Filed 1999·Granted May 21, 2002·51 cites·7 claims
- 2275US7361076B2Method for estimating polishing profile or polishing amount, polishing method and polishing apparatusEBARA CORP·Filed 2007·Granted Apr 22, 2008·4 cites·14 claims
- 2374US6579148B2Polishing apparatusEBARA CORP·Filed 2002·Granted Jun 17, 2003·13 cites·8 claims
- 2474US6190243B1Polishing apparatusEBARA CORP·Filed 1999·Granted Feb 20, 2001·36 cites·17 claims
- 2573US6325698B1Cleaning method and polishing apparatus employing such cleaning methodEBARA CORP·Filed 1999·Granted Dec 4, 2001·31 cites·11 claims
- 2673US4489951AMechanical sealEBARA CORP·Filed 1983·Granted Dec 25, 1984·25 cites·6 claims
- 2772US6217411B1Polishing apparatusEBARA CORP·Filed 1999·Granted Apr 17, 2001·33 cites·11 claims
- 2871US7144520B2Etching method and apparatusJAPAN GOVERNMENT·Filed 2002·Granted Dec 5, 2006·13 cites·16 claims
- 2971US5857898AMethod of and apparatus for dressing polishing clothEBARA CORP·Filed 1997·Granted Jan 12, 1999·41 cites·14 claims
- 3070US6413149B1Abrading plate and polishing method using the sameEBARA CORP·Filed 1999·Granted Jul 2, 2002·31 cites·22 claims
- 3168US6712678B1Polishing-product discharging device and polishing deviceEBARA CORP·Filed 1999·Granted Mar 30, 2004·27 cites·14 claims
- 3268US6336850B1Slurry dispenser and polishing apparatusEBARA CORP·Filed 1998·Granted Jan 8, 2002·28 cites·48 claims
- 3366US6520845B2Polishing apparatusEBARA CORP·Filed 2001·Granted Feb 18, 2003·9 cites·4 claims
- 3466US6406364B1Polishing solution feederEBARA CORP·Filed 1998·Granted Jun 18, 2002·25 cites·34 claims
- 3564US6398626B1Polishing apparatusEBARA CORP·Filed 2000·Granted Jun 4, 2002·8 cites·25 claims
- 3663US7291057B2Apparatus for polishing a substrateEBARA CORP·Filed 2003·Granted Nov 6, 2007·7 cites·6 claims
- 3762US7034285B2Beam source and beam processing apparatusUNIV TOHOKU·Filed 2004·Granted Apr 25, 2006·13 cites·24 claims
- 3862US6196904B1Polishing apparatusEBARA CORP·Filed 1999·Granted Mar 6, 2001·19 cites·10 claims
- 3961US7527723B2Electrolytic processing apparatus and electrolytic processing methodEBARA CORP·Filed 2005·Granted May 5, 2009·2 cites·6 claims
- 4061US7314574B2Etching method and apparatusEBARA CORP·Filed 2002·Granted Jan 1, 2008·7 cites·16 claims
- 4161US6858838B2Neutral particle beam processing apparatusEBARA CORP·Filed 2002·Granted Feb 22, 2005·4 cites·8 claims
- 4261US6626739B1Polishing method and polishing apparatusEBARA CORP·Filed 2000·Granted Sep 30, 2003·7 cites·23 claims
- 4358US6909086B2Neutral particle beam processing apparatusJAPAN GOVERNMENT·Filed 2002·Granted Jun 21, 2005·10 cites·16 claims
- 4457US4910449ASystem for preventing unbalance vibrations and synchronous disturbance vibrationsEBARA CORP·Filed 1988·Granted Mar 20, 1990·17 cites·7 claims
- 4554US5888126APolishing apparatus including turntable with polishing surface of different heightsEBARA CORP·Filed 1996·Granted Mar 30, 1999·15 cites·21 claims
- 4650US6909087B2Method of processing a surface of a workpieceEBARA CORP·Filed 2002·Granted Jun 21, 2005·5 cites·17 claims
- 4749US6261162B1Polishing apparatus and method of manufacturing grinding plateEBARA CORP·Filed 1999·Granted Jul 17, 2001·11 cites·26 claims
- 4849US6102786APolishing apparatus including turntable with polishing surface of different heightsEBARA CORP·Filed 1999·Granted Aug 15, 2000·12 cites·13 claims
- 4948US6413155B2Polishing apparatusEBARA CORP·Filed 2001·Granted Jul 2, 2002·2 cites·9 claims
- 5047US6015337APolishing apparatusEBARA CORP·Filed 1997·Granted Jan 18, 2000·12 cites·11 claims
Showing the top 50 of 66 patent records by PatentIndex Score.
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