Inventor · disambiguated record
Robert J. Machugh
Also filed as: MACHUGH ROBERT J
1 granted patent·2 pending applications·4 citations·filing 2004–2007
25Inventor score
Files withIBM3
Top patents by PatentIndex Score
3 records- 0167US7890202B2Method for creating wafer batches in an automated batch process toolIBM·Filed 2007·Granted Feb 15, 2011·4 cites·30 claims
- 0233US2006025880A1Host control for a variety of tools in semiconductor fabsIBM·Filed 2004·Application pending·0 cites
- 0329US2006271223A1Method and system for integrating equipment integration software, equipment events, mes and rules databasesIBM·Filed 2005·Application pending·0 cites
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