Inventor · disambiguated record

Alex Tsung-Liang Chen

Also filed as: CHEN ALEX TSUNG-LIANG

1 granted patent·0 citations·filing 2015–2015

2Inventor score

Technology areasH10P

Files withVARIAN SEMICONDUCTOR EQUIPMENT ASS INC1

Top patents by PatentIndex Score

1 record

0125US10280512B2Apparatus and method for carbon film deposition profile controlVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2015·Granted May 7, 2019·0 cites·16 claims

Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →